Modelling of mems fabry perot pressure sensor using cmos fabrication process [electronic resources] /
Project Paper (Sarjana Muda) - Universiti Teknologi Malaysia, 2012
| Main Authors: | , |
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| Format: | |
| Language: | eng |
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2012
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| _version_ | 1826452243844431872 |
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| author | Low, Ye Ling 1988 Fakulti Kejuruteraan Elektrik |
| author_facet | Low, Ye Ling 1988 Fakulti Kejuruteraan Elektrik |
| author_sort | Low, Ye Ling 1988 |
| collection | OCEAN |
| description | Project Paper (Sarjana Muda) - Universiti Teknologi Malaysia, 2012 |
| first_indexed | 2024-03-05T12:20:53Z |
| format | |
| id | KOHA-OAI-TEST:477016 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T12:20:53Z |
| publishDate | 2012 |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4770162020-12-19T17:17:35ZModelling of mems fabry perot pressure sensor using cmos fabrication process [electronic resources] / Low, Ye Ling 1988 Fakulti Kejuruteraan Elektrik 2012engProject Paper (Sarjana Muda) - Universiti Teknologi Malaysia, 2012PRZSL |
| spellingShingle | Low, Ye Ling 1988 Fakulti Kejuruteraan Elektrik Modelling of mems fabry perot pressure sensor using cmos fabrication process [electronic resources] / |
| title | Modelling of mems fabry perot pressure sensor using cmos fabrication process [electronic resources] / |
| title_full | Modelling of mems fabry perot pressure sensor using cmos fabrication process [electronic resources] / |
| title_fullStr | Modelling of mems fabry perot pressure sensor using cmos fabrication process [electronic resources] / |
| title_full_unstemmed | Modelling of mems fabry perot pressure sensor using cmos fabrication process [electronic resources] / |
| title_short | Modelling of mems fabry perot pressure sensor using cmos fabrication process [electronic resources] / |
| title_sort | modelling of mems fabry perot pressure sensor using cmos fabrication process electronic resources |
| work_keys_str_mv | AT lowyeling1988 modellingofmemsfabryperotpressuresensorusingcmosfabricationprocesselectronicresources AT fakultikejuruteraanelektrik modellingofmemsfabryperotpressuresensorusingcmosfabricationprocesselectronicresources |