Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD /

Thesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2012

Bibliographic Details
Main Authors: Nurul Aini Tarjudin, 1985-, Samsudi Sakrani, supervisor, Fakulti Sains
Format:
Language:eng
Published: 2012
Subjects:
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author Nurul Aini Tarjudin, 1985-
Samsudi Sakrani, supervisor
Fakulti Sains
author_facet Nurul Aini Tarjudin, 1985-
Samsudi Sakrani, supervisor
Fakulti Sains
author_sort Nurul Aini Tarjudin, 1985-
collection OCEAN
description Thesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2012
first_indexed 2024-03-05T12:36:10Z
format
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institution Universiti Teknologi Malaysia - OCEAN
language eng
last_indexed 2024-03-05T12:36:10Z
publishDate 2012
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spelling KOHA-OAI-TEST:4820832020-12-19T17:17:47ZStructural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD / Nurul Aini Tarjudin, 1985- Samsudi Sakrani, supervisor Fakulti Sains 2012engThesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2012Includes bibliographical referencesFSLNanocrystals Nanostructured materials Thin films
spellingShingle Nanocrystals
Nanostructured materials
Thin films
Nurul Aini Tarjudin, 1985-
Samsudi Sakrani, supervisor
Fakulti Sains
Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD /
title Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD /
title_full Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD /
title_fullStr Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD /
title_full_unstemmed Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD /
title_short Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD /
title_sort structural and optical properties of nanocrystalline silicon thin films grown by 150mhz vhf pecvd
topic Nanocrystals
Nanostructured materials
Thin films
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AT samsudisakranisupervisor structuralandopticalpropertiesofnanocrystallinesiliconthinfilmsgrownby150mhzvhfpecvd
AT fakultisains structuralandopticalpropertiesofnanocrystallinesiliconthinfilmsgrownby150mhzvhfpecvd