Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. /

Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. /

Includes bibliographical references and indexes.

Detalles Bibliográficos
Autores principales: Symposium S, "Microelectromechanical Systems--Materials and Devices IV" (2010 : Boston, Mass.), DelRio, Frank W., Materials Research Society
Formato:
Lenguaje:eng
Publicado: Warrendale, Pa. : Materials Research Society ; New York, NY : Cambridge University Press, 2011
Materias:
Microelectromechanical systems
Thin films
Nanostructured materials
Silicon

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