Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. /
Includes bibliographical references and indexes.
| Main Authors: | , , |
|---|---|
| פורמט: | |
| שפה: | eng |
| יצא לאור: |
Warrendale, Pa. : Materials Research Society ; New York, NY : Cambridge University Press,
2011
|
| נושאים: |