Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. /
Includes bibliographical references and indexes.
| Glavni autori: | , , |
|---|---|
| Format: | |
| Jezik: | eng |
| Izdano: |
Warrendale, Pa. : Materials Research Society ; New York, NY : Cambridge University Press,
2011
|
| Teme: |