Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. /
Includes bibliographical references and indexes.
| Autori principali: | , , |
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| Natura: | |
| Lingua: | eng |
| Pubblicazione: |
Warrendale, Pa. : Materials Research Society ; New York, NY : Cambridge University Press,
2011
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