System-level modeling of MEMS /
Includes bibliographical references and index
Main Authors: | , , |
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格式: | |
语言: | eng |
出版: |
Weinheim : Wiley-VCH,
2013
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_version_ | 1826454000554213376 |
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author | Bechtold, T. (Tamara) Schrag, Gabriele Feng, Lihong |
author_facet | Bechtold, T. (Tamara) Schrag, Gabriele Feng, Lihong |
author_sort | Bechtold, T. (Tamara) |
collection | OCEAN |
description | Includes bibliographical references and index |
first_indexed | 2024-03-05T12:46:39Z |
format | |
id | KOHA-OAI-TEST:485541 |
institution | Universiti Teknologi Malaysia - OCEAN |
language | eng |
last_indexed | 2024-03-05T12:46:39Z |
publishDate | 2013 |
publisher | Weinheim : Wiley-VCH, |
record_format | dspace |
spelling | KOHA-OAI-TEST:4855412020-12-19T17:17:55ZSystem-level modeling of MEMS / Bechtold, T. (Tamara) Schrag, Gabriele Feng, Lihong Weinheim : Wiley-VCH,2013engIncludes bibliographical references and indexPSZJBLMicroelectromechanical systemsMicroelectromechanical systemsURN:ISBN:9783527319039 (hbk.) |
spellingShingle | Microelectromechanical systems Microelectromechanical systems Bechtold, T. (Tamara) Schrag, Gabriele Feng, Lihong System-level modeling of MEMS / |
title | System-level modeling of MEMS / |
title_full | System-level modeling of MEMS / |
title_fullStr | System-level modeling of MEMS / |
title_full_unstemmed | System-level modeling of MEMS / |
title_short | System-level modeling of MEMS / |
title_sort | system level modeling of mems |
topic | Microelectromechanical systems Microelectromechanical systems |
work_keys_str_mv | AT bechtoldttamara systemlevelmodelingofmems AT schraggabriele systemlevelmodelingofmems AT fenglihong systemlevelmodelingofmems |