System-level modeling of MEMS /

Includes bibliographical references and index

书目详细资料
Main Authors: Bechtold, T. (Tamara), Schrag, Gabriele, Feng, Lihong
格式:
语言:eng
出版: Weinheim : Wiley-VCH, 2013
主题:
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author Bechtold, T. (Tamara)
Schrag, Gabriele
Feng, Lihong
author_facet Bechtold, T. (Tamara)
Schrag, Gabriele
Feng, Lihong
author_sort Bechtold, T. (Tamara)
collection OCEAN
description Includes bibliographical references and index
first_indexed 2024-03-05T12:46:39Z
format
id KOHA-OAI-TEST:485541
institution Universiti Teknologi Malaysia - OCEAN
language eng
last_indexed 2024-03-05T12:46:39Z
publishDate 2013
publisher Weinheim : Wiley-VCH,
record_format dspace
spelling KOHA-OAI-TEST:4855412020-12-19T17:17:55ZSystem-level modeling of MEMS / Bechtold, T. (Tamara) Schrag, Gabriele Feng, Lihong Weinheim : Wiley-VCH,2013engIncludes bibliographical references and indexPSZJBLMicroelectromechanical systemsMicroelectromechanical systemsURN:ISBN:9783527319039 (hbk.)
spellingShingle Microelectromechanical systems
Microelectromechanical systems
Bechtold, T. (Tamara)
Schrag, Gabriele
Feng, Lihong
System-level modeling of MEMS /
title System-level modeling of MEMS /
title_full System-level modeling of MEMS /
title_fullStr System-level modeling of MEMS /
title_full_unstemmed System-level modeling of MEMS /
title_short System-level modeling of MEMS /
title_sort system level modeling of mems
topic Microelectromechanical systems
Microelectromechanical systems
work_keys_str_mv AT bechtoldttamara systemlevelmodelingofmems
AT schraggabriele systemlevelmodelingofmems
AT fenglihong systemlevelmodelingofmems