System-level modeling of MEMS /
Includes bibliographical references and index
| Main Authors: | , , |
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| Format: | |
| Language: | eng |
| Published: |
Weinheim : Wiley-VCH,
2013
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| Subjects: |
| _version_ | 1826454000554213376 |
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| author | Bechtold, T. (Tamara) Schrag, Gabriele Feng, Lihong |
| author_facet | Bechtold, T. (Tamara) Schrag, Gabriele Feng, Lihong |
| author_sort | Bechtold, T. (Tamara) |
| collection | OCEAN |
| description | Includes bibliographical references and index |
| first_indexed | 2024-03-05T12:46:39Z |
| format | |
| id | KOHA-OAI-TEST:485541 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T12:46:39Z |
| publishDate | 2013 |
| publisher | Weinheim : Wiley-VCH, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4855412020-12-19T17:17:55ZSystem-level modeling of MEMS / Bechtold, T. (Tamara) Schrag, Gabriele Feng, Lihong Weinheim : Wiley-VCH,2013engIncludes bibliographical references and indexPSZJBLMicroelectromechanical systemsMicroelectromechanical systemsURN:ISBN:9783527319039 (hbk.) |
| spellingShingle | Microelectromechanical systems Microelectromechanical systems Bechtold, T. (Tamara) Schrag, Gabriele Feng, Lihong System-level modeling of MEMS / |
| title | System-level modeling of MEMS / |
| title_full | System-level modeling of MEMS / |
| title_fullStr | System-level modeling of MEMS / |
| title_full_unstemmed | System-level modeling of MEMS / |
| title_short | System-level modeling of MEMS / |
| title_sort | system level modeling of mems |
| topic | Microelectromechanical systems Microelectromechanical systems |
| work_keys_str_mv | AT bechtoldttamara systemlevelmodelingofmems AT schraggabriele systemlevelmodelingofmems AT fenglihong systemlevelmodelingofmems |