System-level modeling of MEMS /

System-level modeling of MEMS /

Includes bibliographical references and index

Bibliographic Details
Main Authors:	Bechtold, T. (Tamara), Schrag, Gabriele, Feng, Lihong
Format:
Language:	eng
Published:	Weinheim : Wiley-VCH, 2013
Subjects:	Microelectromechanical systems

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