System-level modeling of MEMS /

System-level modeling of MEMS /

Includes bibliographical references and index

Dades bibliogràfiques
Autors principals: Bechtold, T. (Tamara), Schrag, Gabriele, Feng, Lihong
Format:
Idioma:eng
Publicat: Weinheim : Wiley-VCH, 2013
Matèries:
Microelectromechanical systems

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