System-level modeling of MEMS /

Includes bibliographical references and index

Detalles Bibliográficos
Main Authors:	Bechtold, T. (Tamara), Schrag, Gabriele, Feng, Lihong
Formato:
Idioma:	eng
Publicado:	Weinheim : Wiley-VCH, 2013
Subjects:	Microelectromechanical systems

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