Sputtering materials for VLSI and thin film devices /
Includes bibliographical references and index.
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Norwich, NY. : William Andrew,
2014
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| Subjects: |
| _version_ | 1796746190980644864 |
|---|---|
| author | Sarkar, Jaydeep |
| author_facet | Sarkar, Jaydeep |
| author_sort | Sarkar, Jaydeep |
| collection | OCEAN |
| description | Includes bibliographical references and index. |
| first_indexed | 2024-03-05T12:50:41Z |
| format | |
| id | KOHA-OAI-TEST:486876 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T12:50:41Z |
| publishDate | 2014 |
| publisher | Norwich, NY. : William Andrew, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4868762020-12-19T17:17:58ZSputtering materials for VLSI and thin film devices / Sarkar, Jaydeep Norwich, NY. : William Andrew,2014engIncludes bibliographical references and index.PSZJBLMicroelectronics Flat panel displaysSputtering (Physics)URN:ISBN:9780815515937 (hbk.) |
| spellingShingle | Microelectronics Flat panel displays Sputtering (Physics) Sarkar, Jaydeep Sputtering materials for VLSI and thin film devices / |
| title | Sputtering materials for VLSI and thin film devices / |
| title_full | Sputtering materials for VLSI and thin film devices / |
| title_fullStr | Sputtering materials for VLSI and thin film devices / |
| title_full_unstemmed | Sputtering materials for VLSI and thin film devices / |
| title_short | Sputtering materials for VLSI and thin film devices / |
| title_sort | sputtering materials for vlsi and thin film devices |
| topic | Microelectronics Flat panel displays Sputtering (Physics) |
| work_keys_str_mv | AT sarkarjaydeep sputteringmaterialsforvlsiandthinfilmdevices |