MEMS : fundamental technology and applications /
Includes bibliographical references and index.
Main Authors: | , |
---|---|
Format: | |
Sprog: | eng |
Udgivet: |
London : Taylor & Francis,
2013
|
Fag: |
Includes bibliographical references and index.
Main Authors: | , |
---|---|
Format: | |
Sprog: | eng |
Udgivet: |
London : Taylor & Francis,
2013
|
Fag: |