Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems /

PSZJBL

Bibliographic Details
Main Author: Feldman, Martin
Format:
Language:eng
Published: United States : Woodhead Publishing, 2013
Subjects:
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author Feldman, Martin
author_facet Feldman, Martin
author_sort Feldman, Martin
collection OCEAN
description PSZJBL
first_indexed 2024-03-05T13:21:03Z
format
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institution Universiti Teknologi Malaysia - OCEAN
language eng
last_indexed 2024-03-05T13:21:03Z
publishDate 2013
publisher United States : Woodhead Publishing,
record_format dspace
spelling KOHA-OAI-TEST:4970212020-12-19T17:18:22ZNanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems / Feldman, Martin United States : Woodhead Publishing,2013engPSZJBL NanolithographyNanoelectronicsNanophotonicsURN:ISBN:9780857095008 (hbk.)
spellingShingle Nanolithography
Nanoelectronics
Nanophotonics
Feldman, Martin
Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems /
title Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems /
title_full Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems /
title_fullStr Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems /
title_full_unstemmed Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems /
title_short Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems /
title_sort nanolithography the art of fabricating nanoelectronic and nanophotonic devices and systems
topic Nanolithography
Nanoelectronics
Nanophotonics
work_keys_str_mv AT feldmanmartin nanolithographytheartoffabricatingnanoelectronicandnanophotonicdevicesandsystems