Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems /
PSZJBL
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
United States : Woodhead Publishing,
2013
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| Subjects: |
| _version_ | 1826456350687756288 |
|---|---|
| author | Feldman, Martin |
| author_facet | Feldman, Martin |
| author_sort | Feldman, Martin |
| collection | OCEAN |
| description | PSZJBL |
| first_indexed | 2024-03-05T13:21:03Z |
| format | |
| id | KOHA-OAI-TEST:497021 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T13:21:03Z |
| publishDate | 2013 |
| publisher | United States : Woodhead Publishing, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4970212020-12-19T17:18:22ZNanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems / Feldman, Martin United States : Woodhead Publishing,2013engPSZJBL NanolithographyNanoelectronicsNanophotonicsURN:ISBN:9780857095008 (hbk.) |
| spellingShingle | Nanolithography Nanoelectronics Nanophotonics Feldman, Martin Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems / |
| title | Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems / |
| title_full | Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems / |
| title_fullStr | Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems / |
| title_full_unstemmed | Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems / |
| title_short | Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems / |
| title_sort | nanolithography the art of fabricating nanoelectronic and nanophotonic devices and systems |
| topic | Nanolithography Nanoelectronics Nanophotonics |
| work_keys_str_mv | AT feldmanmartin nanolithographytheartoffabricatingnanoelectronicandnanophotonicdevicesandsystems |