Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems /
PSZJBL
Main Author: | |
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Format: | |
Language: | eng |
Published: |
United States : Woodhead Publishing,
2013
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Subjects: |
_version_ | 1826456350687756288 |
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author | Feldman, Martin |
author_facet | Feldman, Martin |
author_sort | Feldman, Martin |
collection | OCEAN |
description | PSZJBL |
first_indexed | 2024-03-05T13:21:03Z |
format | |
id | KOHA-OAI-TEST:497021 |
institution | Universiti Teknologi Malaysia - OCEAN |
language | eng |
last_indexed | 2024-03-05T13:21:03Z |
publishDate | 2013 |
publisher | United States : Woodhead Publishing, |
record_format | dspace |
spelling | KOHA-OAI-TEST:4970212020-12-19T17:18:22ZNanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems / Feldman, Martin United States : Woodhead Publishing,2013engPSZJBL NanolithographyNanoelectronicsNanophotonicsURN:ISBN:9780857095008 (hbk.) |
spellingShingle | Nanolithography Nanoelectronics Nanophotonics Feldman, Martin Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems / |
title | Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems / |
title_full | Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems / |
title_fullStr | Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems / |
title_full_unstemmed | Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems / |
title_short | Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems / |
title_sort | nanolithography the art of fabricating nanoelectronic and nanophotonic devices and systems |
topic | Nanolithography Nanoelectronics Nanophotonics |
work_keys_str_mv | AT feldmanmartin nanolithographytheartoffabricatingnanoelectronicandnanophotonicdevicesandsystems |