High fidelity simulation models for equipment performance prediction in semiconductor industry [electronic resource) /
| Main Authors: | , |
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| Format: | |
| Language: | eng |
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2014
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| _version_ | 1796750441289089024 |
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| author | Anwar Ali Vali Mohamed, 1965- Awaluddin Mohamed Shaharoun |
| author_facet | Anwar Ali Vali Mohamed, 1965- Awaluddin Mohamed Shaharoun |
| author_sort | Anwar Ali Vali Mohamed, 1965- |
| collection | OCEAN |
| description | |
| first_indexed | 2024-03-05T13:51:40Z |
| format | |
| id | KOHA-OAI-TEST:507128 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T13:51:40Z |
| publishDate | 2014 |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:5071282020-12-19T17:18:47ZHigh fidelity simulation models for equipment performance prediction in semiconductor industry [electronic resource) / Anwar Ali Vali Mohamed, 1965- Awaluddin Mohamed Shaharoun 2014engIncludes bibliographical referencesPRZSLInformation technologyIndustrial management |
| spellingShingle | Information technology Industrial management Anwar Ali Vali Mohamed, 1965- Awaluddin Mohamed Shaharoun High fidelity simulation models for equipment performance prediction in semiconductor industry [electronic resource) / |
| title | High fidelity simulation models for equipment performance prediction in semiconductor industry [electronic resource) / |
| title_full | High fidelity simulation models for equipment performance prediction in semiconductor industry [electronic resource) / |
| title_fullStr | High fidelity simulation models for equipment performance prediction in semiconductor industry [electronic resource) / |
| title_full_unstemmed | High fidelity simulation models for equipment performance prediction in semiconductor industry [electronic resource) / |
| title_short | High fidelity simulation models for equipment performance prediction in semiconductor industry [electronic resource) / |
| title_sort | high fidelity simulation models for equipment performance prediction in semiconductor industry electronic resource |
| topic | Information technology Industrial management |
| work_keys_str_mv | AT anwaralivalimohamed1965 highfidelitysimulationmodelsforequipmentperformancepredictioninsemiconductorindustryelectronicresource AT awaluddinmohamedshaharoun highfidelitysimulationmodelsforequipmentperformancepredictioninsemiconductorindustryelectronicresource |