MEMS cost analysis : from laboratory to industry /
Includes bibliographical references and index
| 第一著者: | |
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| フォーマット: | |
| 言語: | eng |
| 出版事項: |
Singapore : Pan Stanford Publishing,
2014
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| 主題: |
| _version_ | 1826459083550490624 |
|---|---|
| author | 585433 Lawes, Ronald A. |
| author_facet | 585433 Lawes, Ronald A. |
| author_sort | 585433 Lawes, Ronald A. |
| collection | OCEAN |
| description | Includes bibliographical references and index |
| first_indexed | 2024-03-05T14:01:18Z |
| format | |
| id | KOHA-OAI-TEST:510320 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T14:01:18Z |
| publishDate | 2014 |
| publisher | Singapore : Pan Stanford Publishing, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:5103202020-12-19T17:18:54ZMEMS cost analysis : from laboratory to industry / 585433 Lawes, Ronald A. Singapore : Pan Stanford Publishing,2014engIncludes bibliographical references and index1. The world of MEMS -- 2. Basic fabrication processes -- 3. Surface micromachining -- 4. High-aspect-ratio micromachining -- 5. MEMS testing -- 6. MEMS packaging -- 7. Clean rooms, buildings and plant -- 8. The MEMSCOST spreadsheet -- 9. Product costs : accelerometers -- 10. Product costs : microphones -- 11. MEMS foundries -- 12. Financial reporting and analysis -- 13. Conclusions.PSZJBL Microelectromechanical systems Microelectromechanical systems industryURN:ISBN:9789814411066 |
| spellingShingle | Microelectromechanical systems Microelectromechanical systems industry 585433 Lawes, Ronald A. MEMS cost analysis : from laboratory to industry / |
| title | MEMS cost analysis : from laboratory to industry / |
| title_full | MEMS cost analysis : from laboratory to industry / |
| title_fullStr | MEMS cost analysis : from laboratory to industry / |
| title_full_unstemmed | MEMS cost analysis : from laboratory to industry / |
| title_short | MEMS cost analysis : from laboratory to industry / |
| title_sort | mems cost analysis from laboratory to industry |
| topic | Microelectromechanical systems Microelectromechanical systems industry |
| work_keys_str_mv | AT 585433lawesronalda memscostanalysisfromlaboratorytoindustry |