Design, modeling and control of nanopositioning systems /
Includes bibliographical references and index
| Главные авторы: | , |
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| Формат: | |
| Язык: | eng |
| Опубликовано: |
Cham : Springer ,
c201
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| Предметы: |
| _version_ | 1826460332437012480 |
|---|---|
| author | Fleming, Andrew J. Leang, Kam K. |
| author_facet | Fleming, Andrew J. Leang, Kam K. |
| author_sort | Fleming, Andrew J. |
| collection | OCEAN |
| description | Includes bibliographical references and index |
| first_indexed | 2024-03-05T14:19:40Z |
| format | |
| id | KOHA-OAI-TEST:516331 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T14:19:40Z |
| publishDate | c201 |
| publisher | Cham : Springer , |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:5163312020-12-19T17:19:11ZDesign, modeling and control of nanopositioning systems / Fleming, Andrew J. Leang, Kam K. Cham : Springer ,c2014engIncludes bibliographical references and indexPSZKLLNanotechnologyNanoelectromechanical systemsURN:ISBN:9783319066165 (hbk.) |
| spellingShingle | Nanotechnology Nanoelectromechanical systems Fleming, Andrew J. Leang, Kam K. Design, modeling and control of nanopositioning systems / |
| title | Design, modeling and control of nanopositioning systems / |
| title_full | Design, modeling and control of nanopositioning systems / |
| title_fullStr | Design, modeling and control of nanopositioning systems / |
| title_full_unstemmed | Design, modeling and control of nanopositioning systems / |
| title_short | Design, modeling and control of nanopositioning systems / |
| title_sort | design modeling and control of nanopositioning systems |
| topic | Nanotechnology Nanoelectromechanical systems |
| work_keys_str_mv | AT flemingandrewj designmodelingandcontrolofnanopositioningsystems AT leangkamk designmodelingandcontrolofnanopositioningsystems |