Design, modeling and control of nanopositioning systems /

Design, modeling and control of nanopositioning systems /

Includes bibliographical references and index

Bibliografske podrobnosti
Main Authors:	Fleming, Andrew J., Leang, Kam K.
Format:
Jezik:	eng
Izdano:	Cham : Springer , c201
Teme:	Nanotechnology Nanoelectromechanical systems

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