Design, modeling and control of nanopositioning systems /

Includes bibliographical references and index

Detalhes bibliográficos
Principais autores:	Fleming, Andrew J., Leang, Kam K.
Formato:
Idioma:	eng
Publicado em:	Cham : Springer , c201
Assuntos:	Nanotechnology Nanoelectromechanical systems

Registros relacionados