Design, modeling and control of nanopositioning systems /

Design, modeling and control of nanopositioning systems /

Includes bibliographical references and index

Bibliográfalaš dieđut
Váldodahkkit: Fleming, Andrew J., Leang, Kam K.
Materiálatiipa:
Giella:eng
Almmustuhtton: Cham : Springer , c201
Fáttát:
Nanotechnology
Nanoelectromechanical systems

Geahča maid