Design, modeling and control of nanopositioning systems /

Design, modeling and control of nanopositioning systems /

Includes bibliographical references and index

书目详细资料
Main Authors: Fleming, Andrew J., Leang, Kam K.
格式:
语言:eng
出版: Cham : Springer , c201
主题:
Nanotechnology
Nanoelectromechanical systems

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