Nickel phosphorus coated substrate micro-defect reduction through chemical mechanical planarization process optimization [electronic resource] /
Thesis (Sarjana Kejuruteraan (Kejuruteraan Industri)) - Universiti Teknologi Malaysia, 2014
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| Format: | |
| Language: | eng |
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2014
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| _version_ | 1796753710175485952 |
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| author | Nazim Mohd. Saleh, 1978- author Jafri Mohd. Rohani, 1966-, supervisor Fakulti Kejuruteraan Mekanikal |
| author_facet | Nazim Mohd. Saleh, 1978- author Jafri Mohd. Rohani, 1966-, supervisor Fakulti Kejuruteraan Mekanikal |
| author_sort | Nazim Mohd. Saleh, 1978- author |
| collection | OCEAN |
| description | Thesis (Sarjana Kejuruteraan (Kejuruteraan Industri)) - Universiti Teknologi Malaysia, 2014 |
| first_indexed | 2024-03-05T14:37:53Z |
| format | |
| id | KOHA-OAI-TEST:522383 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T14:37:53Z |
| publishDate | 2014 |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:5223832020-12-19T17:19:38ZNickel phosphorus coated substrate micro-defect reduction through chemical mechanical planarization process optimization [electronic resource] / Nazim Mohd. Saleh, 1978- author Jafri Mohd. Rohani, 1966-, supervisor Fakulti Kejuruteraan Mekanikal 2014engThesis (Sarjana Kejuruteraan (Kejuruteraan Industri)) - Universiti Teknologi Malaysia, 2014Includes bibliographical referencesPSZJBLPhosphorus |
| spellingShingle | Phosphorus Nazim Mohd. Saleh, 1978- author Jafri Mohd. Rohani, 1966-, supervisor Fakulti Kejuruteraan Mekanikal Nickel phosphorus coated substrate micro-defect reduction through chemical mechanical planarization process optimization [electronic resource] / |
| title | Nickel phosphorus coated substrate micro-defect reduction through chemical mechanical planarization process optimization [electronic resource] / |
| title_full | Nickel phosphorus coated substrate micro-defect reduction through chemical mechanical planarization process optimization [electronic resource] / |
| title_fullStr | Nickel phosphorus coated substrate micro-defect reduction through chemical mechanical planarization process optimization [electronic resource] / |
| title_full_unstemmed | Nickel phosphorus coated substrate micro-defect reduction through chemical mechanical planarization process optimization [electronic resource] / |
| title_short | Nickel phosphorus coated substrate micro-defect reduction through chemical mechanical planarization process optimization [electronic resource] / |
| title_sort | nickel phosphorus coated substrate micro defect reduction through chemical mechanical planarization process optimization electronic resource |
| topic | Phosphorus |
| work_keys_str_mv | AT nazimmohdsaleh1978author nickelphosphoruscoatedsubstratemicrodefectreductionthroughchemicalmechanicalplanarizationprocessoptimizationelectronicresource AT jafrimohdrohani1966supervisor nickelphosphoruscoatedsubstratemicrodefectreductionthroughchemicalmechanicalplanarizationprocessoptimizationelectronicresource AT fakultikejuruteraanmekanikal nickelphosphoruscoatedsubstratemicrodefectreductionthroughchemicalmechanicalplanarizationprocessoptimizationelectronicresource |