Nanoscale microstructural characterization of aluminum and copper bilayer thin films deposited on silicon substrate using magnetron sputtering technique [electronic resource] /
Thesis (Sarjana Kejuruteraan (Mekanikal)) - Universiti Teknologi Malaysia, 2014
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| Language: | eng |
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2014
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| _version_ | 1796753910113763328 |
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| author | Zulhelmi Alif Abdul Halim, 1987- author Muhamad Azizi Mat Yajid, supervisor |
| author_facet | Zulhelmi Alif Abdul Halim, 1987- author Muhamad Azizi Mat Yajid, supervisor |
| author_sort | Zulhelmi Alif Abdul Halim, 1987- author |
| collection | OCEAN |
| description | Thesis (Sarjana Kejuruteraan (Mekanikal)) - Universiti Teknologi Malaysia, 2014 |
| first_indexed | 2024-03-05T14:40:40Z |
| format | |
| id | KOHA-OAI-TEST:523314 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T14:40:40Z |
| publishDate | 2014 |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:5233142020-12-19T17:19:41ZNanoscale microstructural characterization of aluminum and copper bilayer thin films deposited on silicon substrate using magnetron sputtering technique [electronic resource] / Zulhelmi Alif Abdul Halim, 1987- author Muhamad Azizi Mat Yajid, supervisor 2014engThesis (Sarjana Kejuruteraan (Mekanikal)) - Universiti Teknologi Malaysia, 2014Includes bibliographical referencesPSZJBLThin films |
| spellingShingle | Thin films Zulhelmi Alif Abdul Halim, 1987- author Muhamad Azizi Mat Yajid, supervisor Nanoscale microstructural characterization of aluminum and copper bilayer thin films deposited on silicon substrate using magnetron sputtering technique [electronic resource] / |
| title | Nanoscale microstructural characterization of aluminum and copper bilayer thin films deposited on silicon substrate using magnetron sputtering technique [electronic resource] / |
| title_full | Nanoscale microstructural characterization of aluminum and copper bilayer thin films deposited on silicon substrate using magnetron sputtering technique [electronic resource] / |
| title_fullStr | Nanoscale microstructural characterization of aluminum and copper bilayer thin films deposited on silicon substrate using magnetron sputtering technique [electronic resource] / |
| title_full_unstemmed | Nanoscale microstructural characterization of aluminum and copper bilayer thin films deposited on silicon substrate using magnetron sputtering technique [electronic resource] / |
| title_short | Nanoscale microstructural characterization of aluminum and copper bilayer thin films deposited on silicon substrate using magnetron sputtering technique [electronic resource] / |
| title_sort | nanoscale microstructural characterization of aluminum and copper bilayer thin films deposited on silicon substrate using magnetron sputtering technique electronic resource |
| topic | Thin films |
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