Nanoscale microstructural characterization of aluminum and copper bilayer thin films deposited on silicon substrate using magnetron sputtering technique [electronic resource] /

Nanoscale microstructural characterization of aluminum and copper bilayer thin films deposited on silicon substrate using magnetron sputtering technique [electronic resource] /

Thesis (Sarjana Kejuruteraan (Mekanikal)) - Universiti Teknologi Malaysia, 2014

Bibliographic Details
Main Authors: Zulhelmi Alif Abdul Halim, 1987- author, Muhamad Azizi Mat Yajid, supervisor
Format:
Language:eng
Published: 2014
Subjects:
Thin films

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