Design of electrostatic actuated cantilever beam for MEMS based optical switch /

Design of electrostatic actuated cantilever beam for MEMS based optical switch /

Project Paper (Sarjana Muda kejuruteraan (Elektrik - Elektronik)) - Universiti Teknologi Malaysia, 2006

Bibliographic Details
Main Author:	325371 Nurhafizah Mahri
Format:
Language:	eng
Published:	Skudai : Universiti Teknologi Malaysia, 2006
Subjects:	Microelectromechanical systems Microelectronics Electromechanical devices

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