Characterizations of silicon nanoneedles grown by very high frequency plasma enhanced chemical vapor deposition /
Thesis (Ph.D (Fizik)) - Universiti Teknologi Malaysia, 2016
Main Authors: | , , |
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Format: | |
Language: | eng |
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Johor Bahru, Johor : Universiti Teknologi Malaysia,
2016
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author | Yasir Hussein Mohammed, 1981- Md. Supar Rohani Fakulti Sains |
author_facet | Yasir Hussein Mohammed, 1981- Md. Supar Rohani Fakulti Sains |
author_sort | Yasir Hussein Mohammed, 1981- |
collection | OCEAN |
description | Thesis (Ph.D (Fizik)) - Universiti Teknologi Malaysia, 2016 |
first_indexed | 2024-03-05T15:20:11Z |
format | |
id | KOHA-OAI-TEST:536400 |
institution | Universiti Teknologi Malaysia - OCEAN |
language | eng |
last_indexed | 2024-03-05T15:20:11Z |
publishDate | 2016 |
publisher | Johor Bahru, Johor : Universiti Teknologi Malaysia, |
record_format | dspace |
spelling | KOHA-OAI-TEST:5364002020-12-19T17:20:13ZCharacterizations of silicon nanoneedles grown by very high frequency plasma enhanced chemical vapor deposition / Yasir Hussein Mohammed, 1981- Md. Supar Rohani Fakulti Sains Johor Bahru, Johor : Universiti Teknologi Malaysia,2016engThesis (Ph.D (Fizik)) - Universiti Teknologi Malaysia, 2016Bibliography: p. 119-140.SPSL |
spellingShingle | Yasir Hussein Mohammed, 1981- Md. Supar Rohani Fakulti Sains Characterizations of silicon nanoneedles grown by very high frequency plasma enhanced chemical vapor deposition / |
title | Characterizations of silicon nanoneedles grown by very high frequency plasma enhanced chemical vapor deposition / |
title_full | Characterizations of silicon nanoneedles grown by very high frequency plasma enhanced chemical vapor deposition / |
title_fullStr | Characterizations of silicon nanoneedles grown by very high frequency plasma enhanced chemical vapor deposition / |
title_full_unstemmed | Characterizations of silicon nanoneedles grown by very high frequency plasma enhanced chemical vapor deposition / |
title_short | Characterizations of silicon nanoneedles grown by very high frequency plasma enhanced chemical vapor deposition / |
title_sort | characterizations of silicon nanoneedles grown by very high frequency plasma enhanced chemical vapor deposition |
work_keys_str_mv | AT yasirhusseinmohammed1981 characterizationsofsiliconnanoneedlesgrownbyveryhighfrequencyplasmaenhancedchemicalvapordeposition AT mdsuparrohani characterizationsofsiliconnanoneedlesgrownbyveryhighfrequencyplasmaenhancedchemicalvapordeposition AT fakultisains characterizationsofsiliconnanoneedlesgrownbyveryhighfrequencyplasmaenhancedchemicalvapordeposition |