MICROLITHOGRAPHY PROCESS TECHNOLOGY FOR IC FABRICATION /
Includes references and index
| Main Author: | |
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| Format: | |
| Language: | eng |
| Published: |
New York, NY : McGraw Hill Book,
1986
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| Subjects: |
| _version_ | 1796757943206543360 |
|---|---|
| author | 217921 Elliott, David |
| author_facet | 217921 Elliott, David |
| author_sort | 217921 Elliott, David |
| collection | OCEAN |
| description | Includes references and index |
| first_indexed | 2024-03-05T15:37:08Z |
| format | |
| id | KOHA-OAI-TEST:542051 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T15:37:08Z |
| publishDate | 1986 |
| publisher | New York, NY : McGraw Hill Book, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:5420512020-12-19T17:20:28ZMICROLITHOGRAPHY PROCESS TECHNOLOGY FOR IC FABRICATION / 217921 Elliott, David New York, NY : McGraw Hill Book, 1986engIncludes references and indexPSZJBLIntegrated circuitsMicrolithographyURN:ISBN:0070193045URN:ISBN: 9780070193048 |
| spellingShingle | Integrated circuits Microlithography 217921 Elliott, David MICROLITHOGRAPHY PROCESS TECHNOLOGY FOR IC FABRICATION / |
| title | MICROLITHOGRAPHY PROCESS TECHNOLOGY FOR IC FABRICATION / |
| title_full | MICROLITHOGRAPHY PROCESS TECHNOLOGY FOR IC FABRICATION / |
| title_fullStr | MICROLITHOGRAPHY PROCESS TECHNOLOGY FOR IC FABRICATION / |
| title_full_unstemmed | MICROLITHOGRAPHY PROCESS TECHNOLOGY FOR IC FABRICATION / |
| title_short | MICROLITHOGRAPHY PROCESS TECHNOLOGY FOR IC FABRICATION / |
| title_sort | microlithography process technology for ic fabrication |
| topic | Integrated circuits Microlithography |
| work_keys_str_mv | AT 217921elliottdavid microlithographyprocesstechnologyforicfabrication |