Phase change analysis of crystalline silicon thin film grown by very high frequency – plasma enhanced chemical vapour deposition and radio frequency – magnetron sputtering /

Phase change analysis of crystalline silicon thin film grown by very high frequency – plasma enhanced chemical vapour deposition and radio frequency – magnetron sputtering /

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Bibliographic Details
Main Author:	Nor Hariz Kadir Rosman, 1993- author 639627
Format:	text
Language:	eng
Published:	Johor Bahru, Johor : Universiti Teknologi Malaysia, 2020
Subjects:	Subject

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