Characterisation of electroless deposition parameter of copper on silicon wafer for through silicon via application /
| Main Author: | |
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| Format: | software, multimedia |
| Language: | eng |
| Published: |
Johor Bahru, Johor : Universiti Teknologi Malaysia,
2019
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| Subjects: |
| _version_ | 1826471481177014272 |
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| author | Shazatul Akmaliah Mior Shahidin, 1982-, author 291310 |
| author_facet | Shazatul Akmaliah Mior Shahidin, 1982-, author 291310 |
| author_sort | Shazatul Akmaliah Mior Shahidin, 1982-, author 291310 |
| collection | OCEAN |
| description | |
| first_indexed | 2024-03-05T17:04:02Z |
| format | software, multimedia |
| id | KOHA-OAI-TEST:599702 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T17:04:02Z |
| publishDate | 2019 |
| publisher | Johor Bahru, Johor : Universiti Teknologi Malaysia, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:5997022023-10-11T03:33:54ZCharacterisation of electroless deposition parameter of copper on silicon wafer for through silicon via application / Shazatul Akmaliah Mior Shahidin, 1982-, author 291310 software, multimediaJohor Bahru, Johor : Universiti Teknologi Malaysia,2019engBibliography: p. 103-110.KK-FK_SKMSubjectSubject |
| spellingShingle | Subject Subject Shazatul Akmaliah Mior Shahidin, 1982-, author 291310 Characterisation of electroless deposition parameter of copper on silicon wafer for through silicon via application / |
| title | Characterisation of electroless deposition parameter of copper on silicon wafer for through silicon via application / |
| title_full | Characterisation of electroless deposition parameter of copper on silicon wafer for through silicon via application / |
| title_fullStr | Characterisation of electroless deposition parameter of copper on silicon wafer for through silicon via application / |
| title_full_unstemmed | Characterisation of electroless deposition parameter of copper on silicon wafer for through silicon via application / |
| title_short | Characterisation of electroless deposition parameter of copper on silicon wafer for through silicon via application / |
| title_sort | characterisation of electroless deposition parameter of copper on silicon wafer for through silicon via application |
| topic | Subject Subject |
| work_keys_str_mv | AT shazatulakmaliahmiorshahidin1982author291310 characterisationofelectrolessdepositionparameterofcopperonsiliconwaferforthroughsiliconviaapplication |