Improving performance in micromachining of silicon wafer using heat-assisted micro electrical discharge method/

Detalhes bibliográficos
Principais autores: Noor Dzulaika Daud 1987-, author 644772, Mohamed Sultan Mohamed Ali 491888, Pei, Ling Leow 490608, Fakulti Kejuruteraan. Sekolah Kejuruteraan Elektrik 619066
Formato: text
Idioma:eng
Publicado em: Johor Bahru, Johor : Universiti Teknologi Malaysia, 2022
Assuntos: