Handbook of VLSI microlithography : principles, technology and applications/
16
| Main Authors: | , |
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| Format: | |
| Published: |
Park Ridge, New Jersey: Noyes Pub.,
1991
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| Subjects: |
| _version_ | 1826368240377397248 |
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| author | Glendinning, William B. Helbert, John N. |
| author_facet | Glendinning, William B. Helbert, John N. |
| author_sort | Glendinning, William B. |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-04T15:46:25Z |
| format | |
| id | KOHA-OAI-TEST:65916 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-04T15:46:25Z |
| publishDate | 1991 |
| publisher | Park Ridge, New Jersey: Noyes Pub., |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:659162020-12-19T16:59:31ZHandbook of VLSI microlithography : principles, technology and applications/ Glendinning, William B. Helbert, John N. Park Ridge, New Jersey: Noyes Pub.,199116PSZJBLIntegrated circuitsMicrolithographyURN:ISBN:0815512813 |
| spellingShingle | Integrated circuits Microlithography Glendinning, William B. Helbert, John N. Handbook of VLSI microlithography : principles, technology and applications/ |
| title | Handbook of VLSI microlithography : principles, technology and applications/ |
| title_full | Handbook of VLSI microlithography : principles, technology and applications/ |
| title_fullStr | Handbook of VLSI microlithography : principles, technology and applications/ |
| title_full_unstemmed | Handbook of VLSI microlithography : principles, technology and applications/ |
| title_short | Handbook of VLSI microlithography : principles, technology and applications/ |
| title_sort | handbook of vlsi microlithography principles technology and applications |
| topic | Integrated circuits Microlithography |
| work_keys_str_mv | AT glendinningwilliamb handbookofvlsimicrolithographyprinciplestechnologyandapplications AT helbertjohnn handbookofvlsimicrolithographyprinciplestechnologyandapplications |