Handbook of VLSI microlithography : principles, technology and applications/
16
मुख्य लेखकों: | , |
---|---|
स्वरूप: | |
प्रकाशित: |
Park Ridge, New Jersey: Noyes Pub.,
1991
|
विषय: |
_version_ | 1826368240377397248 |
---|---|
author | Glendinning, William B. Helbert, John N. |
author_facet | Glendinning, William B. Helbert, John N. |
author_sort | Glendinning, William B. |
collection | OCEAN |
description | 16 |
first_indexed | 2024-03-04T15:46:25Z |
format | |
id | KOHA-OAI-TEST:65916 |
institution | Universiti Teknologi Malaysia - OCEAN |
last_indexed | 2024-03-04T15:46:25Z |
publishDate | 1991 |
publisher | Park Ridge, New Jersey: Noyes Pub., |
record_format | dspace |
spelling | KOHA-OAI-TEST:659162020-12-19T16:59:31ZHandbook of VLSI microlithography : principles, technology and applications/ Glendinning, William B. Helbert, John N. Park Ridge, New Jersey: Noyes Pub.,199116PSZJBLIntegrated circuitsMicrolithographyURN:ISBN:0815512813 |
spellingShingle | Integrated circuits Microlithography Glendinning, William B. Helbert, John N. Handbook of VLSI microlithography : principles, technology and applications/ |
title | Handbook of VLSI microlithography : principles, technology and applications/ |
title_full | Handbook of VLSI microlithography : principles, technology and applications/ |
title_fullStr | Handbook of VLSI microlithography : principles, technology and applications/ |
title_full_unstemmed | Handbook of VLSI microlithography : principles, technology and applications/ |
title_short | Handbook of VLSI microlithography : principles, technology and applications/ |
title_sort | handbook of vlsi microlithography principles technology and applications |
topic | Integrated circuits Microlithography |
work_keys_str_mv | AT glendinningwilliamb handbookofvlsimicrolithographyprinciplestechnologyandapplications AT helbertjohnn handbookofvlsimicrolithographyprinciplestechnologyandapplications |