Handbook of VLSI microlithography : principles, technology and applications/

16

ग्रंथसूची विवरण
मुख्य लेखकों: Glendinning, William B., Helbert, John N.
स्वरूप:
प्रकाशित: Park Ridge, New Jersey: Noyes Pub., 1991
विषय:
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author Glendinning, William B.
Helbert, John N.
author_facet Glendinning, William B.
Helbert, John N.
author_sort Glendinning, William B.
collection OCEAN
description 16
first_indexed 2024-03-04T15:46:25Z
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id KOHA-OAI-TEST:65916
institution Universiti Teknologi Malaysia - OCEAN
last_indexed 2024-03-04T15:46:25Z
publishDate 1991
publisher Park Ridge, New Jersey: Noyes Pub.,
record_format dspace
spelling KOHA-OAI-TEST:659162020-12-19T16:59:31ZHandbook of VLSI microlithography : principles, technology and applications/ Glendinning, William B. Helbert, John N. Park Ridge, New Jersey: Noyes Pub.,199116PSZJBLIntegrated circuitsMicrolithographyURN:ISBN:0815512813
spellingShingle Integrated circuits
Microlithography
Glendinning, William B.
Helbert, John N.
Handbook of VLSI microlithography : principles, technology and applications/
title Handbook of VLSI microlithography : principles, technology and applications/
title_full Handbook of VLSI microlithography : principles, technology and applications/
title_fullStr Handbook of VLSI microlithography : principles, technology and applications/
title_full_unstemmed Handbook of VLSI microlithography : principles, technology and applications/
title_short Handbook of VLSI microlithography : principles, technology and applications/
title_sort handbook of vlsi microlithography principles technology and applications
topic Integrated circuits
Microlithography
work_keys_str_mv AT glendinningwilliamb handbookofvlsimicrolithographyprinciplestechnologyandapplications
AT helbertjohnn handbookofvlsimicrolithographyprinciplestechnologyandapplications