Semiconductor device processing : technology trends in the VLSI era/
16
| Main Author: | |
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| Format: | |
| Published: |
USA : Gordon and Breach Sci. Pub.,
1993
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| Subjects: |
| _version_ | 1826368868706156544 |
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| author | 330349 Castellano, Robert N. |
| author_facet | 330349 Castellano, Robert N. |
| author_sort | 330349 Castellano, Robert N. |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-04T15:55:46Z |
| format | |
| id | KOHA-OAI-TEST:69045 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-04T15:55:46Z |
| publishDate | 1993 |
| publisher | USA : Gordon and Breach Sci. Pub., |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:690452020-12-19T16:59:54ZSemiconductor device processing : technology trends in the VLSI era/ 330349 Castellano, Robert N. USA : Gordon and Breach Sci. Pub.,199316PSZJBLSemiconductorsIntegrated circuitsURN:ISBN:2881245161 |
| spellingShingle | Semiconductors Integrated circuits 330349 Castellano, Robert N. Semiconductor device processing : technology trends in the VLSI era/ |
| title | Semiconductor device processing : technology trends in the VLSI era/ |
| title_full | Semiconductor device processing : technology trends in the VLSI era/ |
| title_fullStr | Semiconductor device processing : technology trends in the VLSI era/ |
| title_full_unstemmed | Semiconductor device processing : technology trends in the VLSI era/ |
| title_short | Semiconductor device processing : technology trends in the VLSI era/ |
| title_sort | semiconductor device processing technology trends in the vlsi era |
| topic | Semiconductors Integrated circuits |
| work_keys_str_mv | AT 330349castellanorobertn semiconductordeviceprocessingtechnologytrendsinthevlsiera |