Simulation of ion implantation in VLSI fabrication process /

Project Paper (Bachelor of Engineering (Electrical - Electronic)) - Universiti Teknologi Malaysia, 2001

Bibliographic Details
Main Author: 441271 Mah, Cheng Chai
Format:
Language:eng
Published: Skudai : Universiti Teknologi Malaysia, 2001
Subjects:
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author 441271 Mah, Cheng Chai
author_facet 441271 Mah, Cheng Chai
author_sort 441271 Mah, Cheng Chai
collection OCEAN
description Project Paper (Bachelor of Engineering (Electrical - Electronic)) - Universiti Teknologi Malaysia, 2001
first_indexed 2024-03-04T17:12:45Z
format
id KOHA-OAI-TEST:94746
institution Universiti Teknologi Malaysia - OCEAN
language eng
last_indexed 2024-03-04T17:12:45Z
publishDate 2001
publisher Skudai : Universiti Teknologi Malaysia,
record_format dspace
spelling KOHA-OAI-TEST:947462020-12-19T17:01:13ZSimulation of ion implantation in VLSI fabrication process / 441271 Mah, Cheng Chai Skudai : Universiti Teknologi Malaysia,2001engProject Paper (Bachelor of Engineering (Electrical - Electronic)) - Universiti Teknologi Malaysia, 200116PRZSLIon implantationSemiconductors
spellingShingle Ion implantation
Semiconductors
441271 Mah, Cheng Chai
Simulation of ion implantation in VLSI fabrication process /
title Simulation of ion implantation in VLSI fabrication process /
title_full Simulation of ion implantation in VLSI fabrication process /
title_fullStr Simulation of ion implantation in VLSI fabrication process /
title_full_unstemmed Simulation of ion implantation in VLSI fabrication process /
title_short Simulation of ion implantation in VLSI fabrication process /
title_sort simulation of ion implantation in vlsi fabrication process
topic Ion implantation
Semiconductors
work_keys_str_mv AT 441271mahchengchai simulationofionimplantationinvlsifabricationprocess