Simulation of ion implantation in VLSI fabrication process /
Project Paper (Bachelor of Engineering (Electrical - Electronic)) - Universiti Teknologi Malaysia, 2001
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| Format: | |
| Language: | eng |
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Skudai : Universiti Teknologi Malaysia,
2001
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| Subjects: |
| _version_ | 1826374124026462208 |
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| author | 441271 Mah, Cheng Chai |
| author_facet | 441271 Mah, Cheng Chai |
| author_sort | 441271 Mah, Cheng Chai |
| collection | OCEAN |
| description | Project Paper (Bachelor of Engineering (Electrical - Electronic)) - Universiti Teknologi Malaysia, 2001 |
| first_indexed | 2024-03-04T17:12:45Z |
| format | |
| id | KOHA-OAI-TEST:94746 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-04T17:12:45Z |
| publishDate | 2001 |
| publisher | Skudai : Universiti Teknologi Malaysia, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:947462020-12-19T17:01:13ZSimulation of ion implantation in VLSI fabrication process / 441271 Mah, Cheng Chai Skudai : Universiti Teknologi Malaysia,2001engProject Paper (Bachelor of Engineering (Electrical - Electronic)) - Universiti Teknologi Malaysia, 200116PRZSLIon implantationSemiconductors |
| spellingShingle | Ion implantation Semiconductors 441271 Mah, Cheng Chai Simulation of ion implantation in VLSI fabrication process / |
| title | Simulation of ion implantation in VLSI fabrication process / |
| title_full | Simulation of ion implantation in VLSI fabrication process / |
| title_fullStr | Simulation of ion implantation in VLSI fabrication process / |
| title_full_unstemmed | Simulation of ion implantation in VLSI fabrication process / |
| title_short | Simulation of ion implantation in VLSI fabrication process / |
| title_sort | simulation of ion implantation in vlsi fabrication process |
| topic | Ion implantation Semiconductors |
| work_keys_str_mv | AT 441271mahchengchai simulationofionimplantationinvlsifabricationprocess |