Simulation of ion implantation in VLSI fabrication process /
Project Paper (Bachelor of Engineering (Electrical - Electronic)) - Universiti Teknologi Malaysia, 2001
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Language: | eng |
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Skudai : Universiti Teknologi Malaysia,
2001
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author | 441271 Mah, Cheng Chai |
author_facet | 441271 Mah, Cheng Chai |
author_sort | 441271 Mah, Cheng Chai |
collection | OCEAN |
description | Project Paper (Bachelor of Engineering (Electrical - Electronic)) - Universiti Teknologi Malaysia, 2001 |
first_indexed | 2024-03-04T17:12:45Z |
format | |
id | KOHA-OAI-TEST:94746 |
institution | Universiti Teknologi Malaysia - OCEAN |
language | eng |
last_indexed | 2024-03-04T17:12:45Z |
publishDate | 2001 |
publisher | Skudai : Universiti Teknologi Malaysia, |
record_format | dspace |
spelling | KOHA-OAI-TEST:947462020-12-19T17:01:13ZSimulation of ion implantation in VLSI fabrication process / 441271 Mah, Cheng Chai Skudai : Universiti Teknologi Malaysia,2001engProject Paper (Bachelor of Engineering (Electrical - Electronic)) - Universiti Teknologi Malaysia, 200116PRZSLIon implantationSemiconductors |
spellingShingle | Ion implantation Semiconductors 441271 Mah, Cheng Chai Simulation of ion implantation in VLSI fabrication process / |
title | Simulation of ion implantation in VLSI fabrication process / |
title_full | Simulation of ion implantation in VLSI fabrication process / |
title_fullStr | Simulation of ion implantation in VLSI fabrication process / |
title_full_unstemmed | Simulation of ion implantation in VLSI fabrication process / |
title_short | Simulation of ion implantation in VLSI fabrication process / |
title_sort | simulation of ion implantation in vlsi fabrication process |
topic | Ion implantation Semiconductors |
work_keys_str_mv | AT 441271mahchengchai simulationofionimplantationinvlsifabricationprocess |