An experimental and finite element investigation of thermally induced inelastic deformation of single-level damascene copper high density interconnect structures /
Thesis (PhD) in Mechanical Engineering - University of New Hampshire, 2001
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Hampshire : University of New Hampshire,
2001
|
| Subjects: |
| _version_ | 1826374278726025216 |
|---|---|
| author | 209526 Nazri Kamsah |
| author_facet | 209526 Nazri Kamsah |
| author_sort | 209526 Nazri Kamsah |
| collection | OCEAN |
| description | Thesis (PhD) in Mechanical Engineering - University of New Hampshire, 2001 |
| first_indexed | 2024-03-04T17:14:59Z |
| format | |
| id | KOHA-OAI-TEST:95501 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-04T17:14:59Z |
| publishDate | 2001 |
| publisher | Hampshire : University of New Hampshire, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:955012020-12-19T17:01:15ZAn experimental and finite element investigation of thermally induced inelastic deformation of single-level damascene copper high density interconnect structures / 209526 Nazri Kamsah Hampshire : University of New Hampshire,2001engThesis (PhD) in Mechanical Engineering - University of New Hampshire, 2001Mikrofilem negatif : MFL 11906 ra16PRZSLSemiconductorsMaterials at high temperatures |
| spellingShingle | Semiconductors Materials at high temperatures 209526 Nazri Kamsah An experimental and finite element investigation of thermally induced inelastic deformation of single-level damascene copper high density interconnect structures / |
| title | An experimental and finite element investigation of thermally induced inelastic deformation of single-level damascene copper high density interconnect structures / |
| title_full | An experimental and finite element investigation of thermally induced inelastic deformation of single-level damascene copper high density interconnect structures / |
| title_fullStr | An experimental and finite element investigation of thermally induced inelastic deformation of single-level damascene copper high density interconnect structures / |
| title_full_unstemmed | An experimental and finite element investigation of thermally induced inelastic deformation of single-level damascene copper high density interconnect structures / |
| title_short | An experimental and finite element investigation of thermally induced inelastic deformation of single-level damascene copper high density interconnect structures / |
| title_sort | experimental and finite element investigation of thermally induced inelastic deformation of single level damascene copper high density interconnect structures |
| topic | Semiconductors Materials at high temperatures |
| work_keys_str_mv | AT 209526nazrikamsah anexperimentalandfiniteelementinvestigationofthermallyinducedinelasticdeformationofsingleleveldamascenecopperhighdensityinterconnectstructures AT 209526nazrikamsah experimentalandfiniteelementinvestigationofthermallyinducedinelasticdeformationofsingleleveldamascenecopperhighdensityinterconnectstructures |