Handbook of VLSI microlithography : principles, technology, and applications /
16
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Norwich : Noyes Publications,
2001
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| Subjects: |
| _version_ | 1826374603862179840 |
|---|---|
| author | Helbert, John N. |
| author_facet | Helbert, John N. |
| author_sort | Helbert, John N. |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-04T17:19:46Z |
| format | |
| id | KOHA-OAI-TEST:97054 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-04T17:19:46Z |
| publishDate | 2001 |
| publisher | Norwich : Noyes Publications, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:970542020-12-19T17:01:19ZHandbook of VLSI microlithography : principles, technology, and applications / Helbert, John N. Norwich : Noyes Publications,2001eng16PSZJBLIntegrated circuitsMicrolithographyURN:ISBN:0815514441 (hbk.) |
| spellingShingle | Integrated circuits Microlithography Helbert, John N. Handbook of VLSI microlithography : principles, technology, and applications / |
| title | Handbook of VLSI microlithography : principles, technology, and applications / |
| title_full | Handbook of VLSI microlithography : principles, technology, and applications / |
| title_fullStr | Handbook of VLSI microlithography : principles, technology, and applications / |
| title_full_unstemmed | Handbook of VLSI microlithography : principles, technology, and applications / |
| title_short | Handbook of VLSI microlithography : principles, technology, and applications / |
| title_sort | handbook of vlsi microlithography principles technology and applications |
| topic | Integrated circuits Microlithography |
| work_keys_str_mv | AT helbertjohnn handbookofvlsimicrolithographyprinciplestechnologyandapplications |