Chemical vapor deposition of tungsten and tungsten silicides : for VLSI/ULSI applications

Chemical vapor deposition of tungsten and tungsten silicides : for VLSI/ULSI applications

16

Bibliographic Details
Main Author:	439284 Schmitz, John E. J.
Format:
Published:	Westwood, N. J. : Noyes Publications, 1992
Subjects:	Integrated circuits Tungsten Vapor-plating

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