Handbook of multilevel metallization for integrated circuits : materials, technology, and applications /
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| Format: | |
| Published: |
Westwood, N. J. : Noyes Publications,
1993
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| Subjects: |
| _version_ | 1826374621691117568 |
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| author | Wilson, Syd R. Tracy, Clarence J. |
| author_facet | Wilson, Syd R. Tracy, Clarence J. |
| author_sort | Wilson, Syd R. |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-04T17:20:03Z |
| format | |
| id | KOHA-OAI-TEST:97141 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-04T17:20:03Z |
| publishDate | 1993 |
| publisher | Westwood, N. J. : Noyes Publications, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:971412020-12-19T17:01:20ZHandbook of multilevel metallization for integrated circuits : materials, technology, and applications / Wilson, Syd R. Tracy, Clarence J. Westwood, N. J. : Noyes Publications,199316PSZJBLMetallizingIntegrated circuitsURN:ISBN:0815513402 (hbk.) |
| spellingShingle | Metallizing Integrated circuits Wilson, Syd R. Tracy, Clarence J. Handbook of multilevel metallization for integrated circuits : materials, technology, and applications / |
| title | Handbook of multilevel metallization for integrated circuits : materials, technology, and applications / |
| title_full | Handbook of multilevel metallization for integrated circuits : materials, technology, and applications / |
| title_fullStr | Handbook of multilevel metallization for integrated circuits : materials, technology, and applications / |
| title_full_unstemmed | Handbook of multilevel metallization for integrated circuits : materials, technology, and applications / |
| title_short | Handbook of multilevel metallization for integrated circuits : materials, technology, and applications / |
| title_sort | handbook of multilevel metallization for integrated circuits materials technology and applications |
| topic | Metallizing Integrated circuits |
| work_keys_str_mv | AT wilsonsydr handbookofmultilevelmetallizationforintegratedcircuitsmaterialstechnologyandapplications AT tracyclarencej handbookofmultilevelmetallizationforintegratedcircuitsmaterialstechnologyandapplications |