Handbook of multilevel metallization for integrated circuits : materials, technology, and applications /
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Westwood, N. J. : Noyes Publications,
1993
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_version_ | 1826374621691117568 |
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author | Wilson, Syd R. Tracy, Clarence J. |
author_facet | Wilson, Syd R. Tracy, Clarence J. |
author_sort | Wilson, Syd R. |
collection | OCEAN |
description | 16 |
first_indexed | 2024-03-04T17:20:03Z |
format | |
id | KOHA-OAI-TEST:97141 |
institution | Universiti Teknologi Malaysia - OCEAN |
last_indexed | 2024-03-04T17:20:03Z |
publishDate | 1993 |
publisher | Westwood, N. J. : Noyes Publications, |
record_format | dspace |
spelling | KOHA-OAI-TEST:971412020-12-19T17:01:20ZHandbook of multilevel metallization for integrated circuits : materials, technology, and applications / Wilson, Syd R. Tracy, Clarence J. Westwood, N. J. : Noyes Publications,199316PSZJBLMetallizingIntegrated circuitsURN:ISBN:0815513402 (hbk.) |
spellingShingle | Metallizing Integrated circuits Wilson, Syd R. Tracy, Clarence J. Handbook of multilevel metallization for integrated circuits : materials, technology, and applications / |
title | Handbook of multilevel metallization for integrated circuits : materials, technology, and applications / |
title_full | Handbook of multilevel metallization for integrated circuits : materials, technology, and applications / |
title_fullStr | Handbook of multilevel metallization for integrated circuits : materials, technology, and applications / |
title_full_unstemmed | Handbook of multilevel metallization for integrated circuits : materials, technology, and applications / |
title_short | Handbook of multilevel metallization for integrated circuits : materials, technology, and applications / |
title_sort | handbook of multilevel metallization for integrated circuits materials technology and applications |
topic | Metallizing Integrated circuits |
work_keys_str_mv | AT wilsonsydr handbookofmultilevelmetallizationforintegratedcircuitsmaterialstechnologyandapplications AT tracyclarencej handbookofmultilevelmetallizationforintegratedcircuitsmaterialstechnologyandapplications |