Handbook of multilevel metallization for integrated circuits : materials, technology, and applications /

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Bibliographic Details
Main Authors: Wilson, Syd R., Tracy, Clarence J.
Format:
Published: Westwood, N. J. : Noyes Publications, 1993
Subjects:
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author Wilson, Syd R.
Tracy, Clarence J.
author_facet Wilson, Syd R.
Tracy, Clarence J.
author_sort Wilson, Syd R.
collection OCEAN
description 16
first_indexed 2024-03-04T17:20:03Z
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id KOHA-OAI-TEST:97141
institution Universiti Teknologi Malaysia - OCEAN
last_indexed 2024-03-04T17:20:03Z
publishDate 1993
publisher Westwood, N. J. : Noyes Publications,
record_format dspace
spelling KOHA-OAI-TEST:971412020-12-19T17:01:20ZHandbook of multilevel metallization for integrated circuits : materials, technology, and applications / Wilson, Syd R. Tracy, Clarence J. Westwood, N. J. : Noyes Publications,199316PSZJBLMetallizingIntegrated circuitsURN:ISBN:0815513402 (hbk.)
spellingShingle Metallizing
Integrated circuits
Wilson, Syd R.
Tracy, Clarence J.
Handbook of multilevel metallization for integrated circuits : materials, technology, and applications /
title Handbook of multilevel metallization for integrated circuits : materials, technology, and applications /
title_full Handbook of multilevel metallization for integrated circuits : materials, technology, and applications /
title_fullStr Handbook of multilevel metallization for integrated circuits : materials, technology, and applications /
title_full_unstemmed Handbook of multilevel metallization for integrated circuits : materials, technology, and applications /
title_short Handbook of multilevel metallization for integrated circuits : materials, technology, and applications /
title_sort handbook of multilevel metallization for integrated circuits materials technology and applications
topic Metallizing
Integrated circuits
work_keys_str_mv AT wilsonsydr handbookofmultilevelmetallizationforintegratedcircuitsmaterialstechnologyandapplications
AT tracyclarencej handbookofmultilevelmetallizationforintegratedcircuitsmaterialstechnologyandapplications