Handbook of multilevel metallization for integrated circuits : materials, technology, and applications /

Handbook of multilevel metallization for integrated circuits : materials, technology, and applications /

16

Bibliographic Details
Main Authors:	Wilson, Syd R., Tracy, Clarence J.
Format:
Published:	Westwood, N. J. : Noyes Publications, 1993
Subjects:	Metallizing Integrated circuits

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