Design of Electrostatic Comb Actuators based on Finite Element Method
Electrostatic comb actuators are commonly used to provide displacement-invariant force in micro electro-mechanical system (MEMS). Major application can be found in resonator, inertial sensor, accelerometer, and gyroscope. The size of the comb may be a few microns to millimeters. Principally, the ele...
| Main Authors: | , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English English |
| Published: |
2010
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| Subjects: | |
| Online Access: | http://umpir.ump.edu.my/id/eprint/10463/1/fkm-2010-zakri-Design%20of%20electrostatic.pdf http://umpir.ump.edu.my/id/eprint/10463/7/fkm-2010-zakri-%20Design%20of%20Electrostatic.pdf |