The Fabrication of PDMS mould for Microelectrode Array Biochip using NIL
In recent years, low-cost micro and nano fabrication process have gain intention from the manufacturing industry. Biochip is a platform of miniaturized microarrays arranged on a solid substrate that allows various biological tests to achieve immediate results. The development of biochip has establis...
| Main Authors: | , , , |
|---|---|
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
IOP Publishing
2016
|
| Subjects: | |
| Online Access: | http://umpir.ump.edu.my/id/eprint/12857/1/The%20Fabrication%20of%20PDMS%20mould%20for%20Microelectrode%20Array%20Biochip%20using%20NIL.pdf |
| _version_ | 1825822876256698368 |
|---|---|
| author | Khi, Khim Beh Fahmi, Samsuri Tze, Pin Lee Khairudin, Mohamed |
| author_facet | Khi, Khim Beh Fahmi, Samsuri Tze, Pin Lee Khairudin, Mohamed |
| author_sort | Khi, Khim Beh |
| collection | UMP |
| description | In recent years, low-cost micro and nano fabrication process have gain intention from the manufacturing industry. Biochip is a platform of miniaturized microarrays arranged on a solid substrate that allows various biological tests to achieve immediate results. The development of biochip has established a new platform in biomedical industry. However, to fulfill the demands and availability in the market with affordable cost requires high volume manufacturing techniques for the fabrication of the biochips. In this article we will discuss the fabrication of PDMS mould for replicating microelectrode array of biochip. The fabrication of the microelectrodes utilizes the Nanoimprint lithography (NIL) technique. Finally, the fabrication of PDMS mould has been demonstrated successfully for using Nanoimprint
lithography (NIL) technique and achieved 13 % of size difference in overall. |
| first_indexed | 2024-03-06T12:03:03Z |
| format | Conference or Workshop Item |
| id | UMPir12857 |
| institution | Universiti Malaysia Pahang |
| language | English |
| last_indexed | 2024-03-06T12:03:03Z |
| publishDate | 2016 |
| publisher | IOP Publishing |
| record_format | dspace |
| spelling | UMPir128572018-05-16T07:44:02Z http://umpir.ump.edu.my/id/eprint/12857/ The Fabrication of PDMS mould for Microelectrode Array Biochip using NIL Khi, Khim Beh Fahmi, Samsuri Tze, Pin Lee Khairudin, Mohamed TK Electrical engineering. Electronics Nuclear engineering In recent years, low-cost micro and nano fabrication process have gain intention from the manufacturing industry. Biochip is a platform of miniaturized microarrays arranged on a solid substrate that allows various biological tests to achieve immediate results. The development of biochip has established a new platform in biomedical industry. However, to fulfill the demands and availability in the market with affordable cost requires high volume manufacturing techniques for the fabrication of the biochips. In this article we will discuss the fabrication of PDMS mould for replicating microelectrode array of biochip. The fabrication of the microelectrodes utilizes the Nanoimprint lithography (NIL) technique. Finally, the fabrication of PDMS mould has been demonstrated successfully for using Nanoimprint lithography (NIL) technique and achieved 13 % of size difference in overall. IOP Publishing 2016 Conference or Workshop Item PeerReviewed application/pdf en cc_by http://umpir.ump.edu.my/id/eprint/12857/1/The%20Fabrication%20of%20PDMS%20mould%20for%20Microelectrode%20Array%20Biochip%20using%20NIL.pdf Khi, Khim Beh and Fahmi, Samsuri and Tze, Pin Lee and Khairudin, Mohamed (2016) The Fabrication of PDMS mould for Microelectrode Array Biochip using NIL. In: IOP Conference Series: Materials Science and Engineering, 2nd International Manufacturing Engineering Conference and 3rd Asia-Pacific Conference on Manufacturing Systems (iMEC-APCOMS 2015) , 12-14 November 2015 , Kuala Lumpur, Malaysia. pp. 1-11., 114 (213001). ISSN 1757-8981 (Print), 1757-899X (Online) (Published) https://doi.org/10.1088/1361-6463/aa66ec doi:10.1088/1757-899X/114/1/012026 |
| spellingShingle | TK Electrical engineering. Electronics Nuclear engineering Khi, Khim Beh Fahmi, Samsuri Tze, Pin Lee Khairudin, Mohamed The Fabrication of PDMS mould for Microelectrode Array Biochip using NIL |
| title | The Fabrication of PDMS mould for Microelectrode Array Biochip using NIL |
| title_full | The Fabrication of PDMS mould for Microelectrode Array Biochip using NIL |
| title_fullStr | The Fabrication of PDMS mould for Microelectrode Array Biochip using NIL |
| title_full_unstemmed | The Fabrication of PDMS mould for Microelectrode Array Biochip using NIL |
| title_short | The Fabrication of PDMS mould for Microelectrode Array Biochip using NIL |
| title_sort | fabrication of pdms mould for microelectrode array biochip using nil |
| topic | TK Electrical engineering. Electronics Nuclear engineering |
| url | http://umpir.ump.edu.my/id/eprint/12857/1/The%20Fabrication%20of%20PDMS%20mould%20for%20Microelectrode%20Array%20Biochip%20using%20NIL.pdf |
| work_keys_str_mv | AT khikhimbeh thefabricationofpdmsmouldformicroelectrodearraybiochipusingnil AT fahmisamsuri thefabricationofpdmsmouldformicroelectrodearraybiochipusingnil AT tzepinlee thefabricationofpdmsmouldformicroelectrodearraybiochipusingnil AT khairudinmohamed thefabricationofpdmsmouldformicroelectrodearraybiochipusingnil AT khikhimbeh fabricationofpdmsmouldformicroelectrodearraybiochipusingnil AT fahmisamsuri fabricationofpdmsmouldformicroelectrodearraybiochipusingnil AT tzepinlee fabricationofpdmsmouldformicroelectrodearraybiochipusingnil AT khairudinmohamed fabricationofpdmsmouldformicroelectrodearraybiochipusingnil |