Process development of the device using in-house plate-to-plate tool with nanoimprint lithography technique for biochip application

Biochip is a promising device with capabilities of performing sorting, trapping and screening a large number of biological samples in a short time. Fabrication of biochip pattern process leads to an opening study towards the development of a working biochip. The traditional photolithography process...

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Main Author: Samsuri, Fahmi B.
Format: Research Book Profile
Language:English
Published: 2013
Subjects:
Online Access:http://umpir.ump.edu.my/id/eprint/36267/1/Process%20development%20of%20the%20device%20using%20in-house%20plate-to-plate%20tool%20with%20nanoimprint%20lithography%20technique%20for%20biochip%20application.pdf
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author Samsuri, Fahmi B.
author_facet Samsuri, Fahmi B.
author_sort Samsuri, Fahmi B.
collection UMP
description Biochip is a promising device with capabilities of performing sorting, trapping and screening a large number of biological samples in a short time. Fabrication of biochip pattern process leads to an opening study towards the development of a working biochip. The traditional photolithography process have a limitation in achieving high throughput for biochip pattem fabrication. In this research, the fab1ication process of biochip pattern was developed and the imprint parameter for biochip pattern using an in-house assembled plate-to-plate tool was investigated. The biochip pattems are prepared from existing projection lithography to create the mold. Using soft lithography technique, the biochip pattem was replicated invertly in the PDMS mold.
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spelling UMPir362672023-01-04T03:47:20Z http://umpir.ump.edu.my/id/eprint/36267/ Process development of the device using in-house plate-to-plate tool with nanoimprint lithography technique for biochip application Samsuri, Fahmi B. TK Electrical engineering. Electronics Nuclear engineering Biochip is a promising device with capabilities of performing sorting, trapping and screening a large number of biological samples in a short time. Fabrication of biochip pattern process leads to an opening study towards the development of a working biochip. The traditional photolithography process have a limitation in achieving high throughput for biochip pattem fabrication. In this research, the fab1ication process of biochip pattern was developed and the imprint parameter for biochip pattern using an in-house assembled plate-to-plate tool was investigated. The biochip pattems are prepared from existing projection lithography to create the mold. Using soft lithography technique, the biochip pattem was replicated invertly in the PDMS mold. 2013 Research Book Profile NonPeerReviewed pdf en http://umpir.ump.edu.my/id/eprint/36267/1/Process%20development%20of%20the%20device%20using%20in-house%20plate-to-plate%20tool%20with%20nanoimprint%20lithography%20technique%20for%20biochip%20application.pdf Samsuri, Fahmi B. (2013) Process development of the device using in-house plate-to-plate tool with nanoimprint lithography technique for biochip application. (Unpublished)
spellingShingle TK Electrical engineering. Electronics Nuclear engineering
Samsuri, Fahmi B.
Process development of the device using in-house plate-to-plate tool with nanoimprint lithography technique for biochip application
title Process development of the device using in-house plate-to-plate tool with nanoimprint lithography technique for biochip application
title_full Process development of the device using in-house plate-to-plate tool with nanoimprint lithography technique for biochip application
title_fullStr Process development of the device using in-house plate-to-plate tool with nanoimprint lithography technique for biochip application
title_full_unstemmed Process development of the device using in-house plate-to-plate tool with nanoimprint lithography technique for biochip application
title_short Process development of the device using in-house plate-to-plate tool with nanoimprint lithography technique for biochip application
title_sort process development of the device using in house plate to plate tool with nanoimprint lithography technique for biochip application
topic TK Electrical engineering. Electronics Nuclear engineering
url http://umpir.ump.edu.my/id/eprint/36267/1/Process%20development%20of%20the%20device%20using%20in-house%20plate-to-plate%20tool%20with%20nanoimprint%20lithography%20technique%20for%20biochip%20application.pdf
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