Development of piezoelectric thin film of zinc oxide on aluminum substrate for vibration sensor application

This thesis deals with ambient energy harvesting by using zinc oxide thin film. The objective of this thesis is to prove the ZnO film as a piezoelectric material can produce electric when vibration is applied and determine its optimal piezoelectric voltage. The thesis describes the sol gel spin coat...

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Main Authors: Sutjipto, Agus Geter Edy, Jusoh, Mohamad Ashry, Mazni, Mustafa
Format: Research Report
Language:English
Published: 2019
Subjects:
Online Access:http://umpir.ump.edu.my/id/eprint/36325/1/Development%20of%20piezoelectric%20thin%20film%20of%20zinc%20oxide%20on%20aluminum%20substrate%20for%20vibration%20sensor%20application.wm.pdf
_version_ 1825814726207078400
author Sutjipto, Agus Geter Edy
Jusoh, Mohamad Ashry
Mazni, Mustafa
author_facet Sutjipto, Agus Geter Edy
Jusoh, Mohamad Ashry
Mazni, Mustafa
author_sort Sutjipto, Agus Geter Edy
collection UMP
description This thesis deals with ambient energy harvesting by using zinc oxide thin film. The objective of this thesis is to prove the ZnO film as a piezoelectric material can produce electric when vibration is applied and determine its optimal piezoelectric voltage. The thesis describes the sol gel spin coating technique to fabricate zinc oxide thin film. Zinc acetate dehydrate, absolute ethanol and diethanolamine were used in this thesis to act as sol gel precursor. Sol gel was coated on glass slide which wrapped by aluminum foil. The thin film was formed after preheating and annealing. The thin film was characterized by X-ray diffraction (XRD), Field Emission Scanning Electron Microscopy (FESEM), Photoluminescence spectroscopy (PL) and Ultraviolet- visible spectroscopy (UV-Vis) as well as analyzed using vibration technique. From XRD results, the films were preferentially diffracted at 65° which corresponding to (1 1 2) diffraction phase. From FESEM results, it was observed that when the spin speed was increased at same annealing temperature, the grain size was decreased and the thickness was also decreased. When the annealing temperature was increased at same spin speed, the grain size was increased and the thickness was increased. From the PL results, it was observed that there was only film with spin speed of 2000 rpm and annealing with 300 °C had slightly left wavelength which is around 380 nm. Annealing temperature would affect only the intensity of PL wavelength. From the result of UV-Vis, it was observed that when the spin speed was increased at same annealing temperature, the band gap was decreased. When the annealing temperature was increased at same spin speed, the band gap was decreased. Piezoelectric test had proven the ZnO film could produce electricity. The maximum voltage (20.7 mV) was produced by the ZnO film with spin speed of 2000 rpm and annealing with 300 °C.
first_indexed 2024-03-06T13:02:50Z
format Research Report
id UMPir36325
institution Universiti Malaysia Pahang
language English
last_indexed 2024-03-06T13:02:50Z
publishDate 2019
record_format dspace
spelling UMPir363252023-02-16T03:09:38Z http://umpir.ump.edu.my/id/eprint/36325/ Development of piezoelectric thin film of zinc oxide on aluminum substrate for vibration sensor application Sutjipto, Agus Geter Edy Jusoh, Mohamad Ashry Mazni, Mustafa Q Science (General) T Technology (General) This thesis deals with ambient energy harvesting by using zinc oxide thin film. The objective of this thesis is to prove the ZnO film as a piezoelectric material can produce electric when vibration is applied and determine its optimal piezoelectric voltage. The thesis describes the sol gel spin coating technique to fabricate zinc oxide thin film. Zinc acetate dehydrate, absolute ethanol and diethanolamine were used in this thesis to act as sol gel precursor. Sol gel was coated on glass slide which wrapped by aluminum foil. The thin film was formed after preheating and annealing. The thin film was characterized by X-ray diffraction (XRD), Field Emission Scanning Electron Microscopy (FESEM), Photoluminescence spectroscopy (PL) and Ultraviolet- visible spectroscopy (UV-Vis) as well as analyzed using vibration technique. From XRD results, the films were preferentially diffracted at 65° which corresponding to (1 1 2) diffraction phase. From FESEM results, it was observed that when the spin speed was increased at same annealing temperature, the grain size was decreased and the thickness was also decreased. When the annealing temperature was increased at same spin speed, the grain size was increased and the thickness was increased. From the PL results, it was observed that there was only film with spin speed of 2000 rpm and annealing with 300 °C had slightly left wavelength which is around 380 nm. Annealing temperature would affect only the intensity of PL wavelength. From the result of UV-Vis, it was observed that when the spin speed was increased at same annealing temperature, the band gap was decreased. When the annealing temperature was increased at same spin speed, the band gap was decreased. Piezoelectric test had proven the ZnO film could produce electricity. The maximum voltage (20.7 mV) was produced by the ZnO film with spin speed of 2000 rpm and annealing with 300 °C. 2019 Research Report NonPeerReviewed pdf en http://umpir.ump.edu.my/id/eprint/36325/1/Development%20of%20piezoelectric%20thin%20film%20of%20zinc%20oxide%20on%20aluminum%20substrate%20for%20vibration%20sensor%20application.wm.pdf Sutjipto, Agus Geter Edy and Jusoh, Mohamad Ashry and Mazni, Mustafa (2019) Development of piezoelectric thin film of zinc oxide on aluminum substrate for vibration sensor application. , [Research Report] (Unpublished)
spellingShingle Q Science (General)
T Technology (General)
Sutjipto, Agus Geter Edy
Jusoh, Mohamad Ashry
Mazni, Mustafa
Development of piezoelectric thin film of zinc oxide on aluminum substrate for vibration sensor application
title Development of piezoelectric thin film of zinc oxide on aluminum substrate for vibration sensor application
title_full Development of piezoelectric thin film of zinc oxide on aluminum substrate for vibration sensor application
title_fullStr Development of piezoelectric thin film of zinc oxide on aluminum substrate for vibration sensor application
title_full_unstemmed Development of piezoelectric thin film of zinc oxide on aluminum substrate for vibration sensor application
title_short Development of piezoelectric thin film of zinc oxide on aluminum substrate for vibration sensor application
title_sort development of piezoelectric thin film of zinc oxide on aluminum substrate for vibration sensor application
topic Q Science (General)
T Technology (General)
url http://umpir.ump.edu.my/id/eprint/36325/1/Development%20of%20piezoelectric%20thin%20film%20of%20zinc%20oxide%20on%20aluminum%20substrate%20for%20vibration%20sensor%20application.wm.pdf
work_keys_str_mv AT sutjiptoagusgeteredy developmentofpiezoelectricthinfilmofzincoxideonaluminumsubstrateforvibrationsensorapplication
AT jusohmohamadashry developmentofpiezoelectricthinfilmofzincoxideonaluminumsubstrateforvibrationsensorapplication
AT maznimustafa developmentofpiezoelectricthinfilmofzincoxideonaluminumsubstrateforvibrationsensorapplication