On Generation of Micro-Feature on Silicon with an Industrial Laser
Generation of a micro feature on mono-crystalline silicon surface using an industrial laser is presented. The main objective is to investigate the capability of the industrial laser, Nd:YAG, in generating a micro-feature on silicon surface. The unpolished silicon surface was irradiated with the Nd:Y...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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Trans Tech Publications
2014
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| Subjects: | |
| Online Access: | http://umpir.ump.edu.my/id/eprint/4586/1/On_generation_of_micro_feature_on_silicon_with_an_industrial_laser_Materials_science_forum_%282014%29.pdf |
| _version_ | 1796989830870073344 |
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| author | M., Ishak Thet, Thet Mon Noriah, Bidin Yap, Tze Chuen |
| author_facet | M., Ishak Thet, Thet Mon Noriah, Bidin Yap, Tze Chuen |
| author_sort | M., Ishak |
| collection | UMP |
| description | Generation of a micro feature on mono-crystalline silicon surface using an industrial laser is presented. The main objective is to investigate the capability of the industrial laser, Nd:YAG, in generating a micro-feature on silicon surface. The unpolished silicon surface was irradiated with the Nd:YAG laser beam of controlled pulse width and power. In phase 1, the irradiations were done
without incorporating an assist gas into the process. In phase 2, the compressed air maintaining its
pressure at 4 bars, was supplied as an assist gas during laser irradiation. Design of experiment was adopted to systematically determine the number of experimental runs in each phase as well as to fine tune the important parameters through the statistical analysis. Laser-generated structures were observed under scanning electron microscope. Micrographs reveal that most of the features appear to be cone-like with an almost true circle at the base. The diameter of the cone is found to be as
small as 200 µm. The quality of such micro-features and analysis of the effect of the process parameters on the feature quality show that in general, laser pulse width has more appreciable effect than the laser power on the micro-feature geometry as well as quality. Laser irradiation without the assist gas produces better results in terms of a feature size.
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| first_indexed | 2024-03-06T11:42:52Z |
| format | Article |
| id | UMPir4586 |
| institution | Universiti Malaysia Pahang |
| language | English |
| last_indexed | 2024-03-06T11:42:52Z |
| publishDate | 2014 |
| publisher | Trans Tech Publications |
| record_format | dspace |
| spelling | UMPir45862015-06-23T07:19:35Z http://umpir.ump.edu.my/id/eprint/4586/ On Generation of Micro-Feature on Silicon with an Industrial Laser M., Ishak Thet, Thet Mon Noriah, Bidin Yap, Tze Chuen TJ Mechanical engineering and machinery Generation of a micro feature on mono-crystalline silicon surface using an industrial laser is presented. The main objective is to investigate the capability of the industrial laser, Nd:YAG, in generating a micro-feature on silicon surface. The unpolished silicon surface was irradiated with the Nd:YAG laser beam of controlled pulse width and power. In phase 1, the irradiations were done without incorporating an assist gas into the process. In phase 2, the compressed air maintaining its pressure at 4 bars, was supplied as an assist gas during laser irradiation. Design of experiment was adopted to systematically determine the number of experimental runs in each phase as well as to fine tune the important parameters through the statistical analysis. Laser-generated structures were observed under scanning electron microscope. Micrographs reveal that most of the features appear to be cone-like with an almost true circle at the base. The diameter of the cone is found to be as small as 200 µm. The quality of such micro-features and analysis of the effect of the process parameters on the feature quality show that in general, laser pulse width has more appreciable effect than the laser power on the micro-feature geometry as well as quality. Laser irradiation without the assist gas produces better results in terms of a feature size. Trans Tech Publications 2014 Article PeerReviewed application/pdf en http://umpir.ump.edu.my/id/eprint/4586/1/On_generation_of_micro_feature_on_silicon_with_an_industrial_laser_Materials_science_forum_%282014%29.pdf M., Ishak and Thet, Thet Mon and Noriah, Bidin and Yap, Tze Chuen (2014) On Generation of Micro-Feature on Silicon with an Industrial Laser. Materials Science Forum, 773 - . pp. 661-669. ISSN 0255-5476. (Published) http://dx.doi.org/10.4028/www.scientific.net/MSF.773-774.661 DOI: 10.4028/www.scientific.net/MSF.773-774.661 |
| spellingShingle | TJ Mechanical engineering and machinery M., Ishak Thet, Thet Mon Noriah, Bidin Yap, Tze Chuen On Generation of Micro-Feature on Silicon with an Industrial Laser |
| title | On Generation of Micro-Feature on Silicon with an Industrial Laser |
| title_full | On Generation of Micro-Feature on Silicon with an Industrial Laser |
| title_fullStr | On Generation of Micro-Feature on Silicon with an Industrial Laser |
| title_full_unstemmed | On Generation of Micro-Feature on Silicon with an Industrial Laser |
| title_short | On Generation of Micro-Feature on Silicon with an Industrial Laser |
| title_sort | on generation of micro feature on silicon with an industrial laser |
| topic | TJ Mechanical engineering and machinery |
| url | http://umpir.ump.edu.my/id/eprint/4586/1/On_generation_of_micro_feature_on_silicon_with_an_industrial_laser_Materials_science_forum_%282014%29.pdf |
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