Effect of Bonding Strength on Electromigration Failure in Cu–Cu Bumps
In microelectronic packaging technology for three-dimensional integrated circuits (3D ICs), Cu-to-Cu direct bonding appears to be the solution to solve the problems of Joule heating and electromigration (EM) in solder microbumps under 10 <inline-formula><math xmlns="http://www.w3.org/1...
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MDPI AG
2021-10-01
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| Series: | Materials |
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| Online Access: | https://www.mdpi.com/1996-1944/14/21/6394 |
| _version_ | 1797512188836970496 |
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| author | Kai-Cheng Shie Po-Ning Hsu Yu-Jin Li K. N. Tu Chih Chen |
| author_facet | Kai-Cheng Shie Po-Ning Hsu Yu-Jin Li K. N. Tu Chih Chen |
| author_sort | Kai-Cheng Shie |
| collection | DOAJ |
| description | In microelectronic packaging technology for three-dimensional integrated circuits (3D ICs), Cu-to-Cu direct bonding appears to be the solution to solve the problems of Joule heating and electromigration (EM) in solder microbumps under 10 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mrow><mi mathvariant="sans-serif">μ</mi><mi mathvariant="normal">m</mi></mrow></mrow></semantics></math></inline-formula> in diameter. However, EM will occur in Cu–Cu bumps when the current density is over <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><msup><mrow><mn>10</mn></mrow><mn>6</mn></msup><mo> </mo><mi mathvariant="normal">A</mi><mo>/</mo><msup><mrow><mi>cm</mi></mrow><mn>2</mn></msup></mrow></semantics></math></inline-formula>. The surface, grain boundary, and the interface between the Cu and TiW adhesion layer are the three major diffusion paths in EM tests, and which one may lead to early failure is of interest. This study showed that bonding strength affects the outcome. First, if the bonding strength is not strong enough to sustain the thermal mismatch of materials during EM tests, the bonding interface will fracture and lead to an open circuit of early failure. Second, if the bonding strength can sustain the bonding structure, voids will form at the passivation contact area between the Cu–Cu bump and redistribution layer (RDL) due to current crowding. When the void grows along the passivation interface and separates the Cu–Cu bump and RDL, an open circuit can occur, especially when the current density and temperature are severe. Third, under excellent bonding, when the voids at the contact area between the Cu–Cu bump and RDL do not merge together, the EM lifetime can be more than 5000 h. |
| first_indexed | 2024-03-10T05:57:23Z |
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| id | doaj.art-001536b276f041919c682d97487e8dc0 |
| institution | Directory Open Access Journal |
| issn | 1996-1944 |
| language | English |
| last_indexed | 2024-03-10T05:57:23Z |
| publishDate | 2021-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Materials |
| spelling | doaj.art-001536b276f041919c682d97487e8dc02023-11-22T21:11:28ZengMDPI AGMaterials1996-19442021-10-011421639410.3390/ma14216394Effect of Bonding Strength on Electromigration Failure in Cu–Cu BumpsKai-Cheng Shie0Po-Ning Hsu1Yu-Jin Li2K. N. Tu3Chih Chen4Department of Materials Science and Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, TaiwanDepartment of Materials Science and Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, TaiwanDepartment of Materials Science and Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, TaiwanDepartment of Materials Science and Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, TaiwanDepartment of Materials Science and Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, TaiwanIn microelectronic packaging technology for three-dimensional integrated circuits (3D ICs), Cu-to-Cu direct bonding appears to be the solution to solve the problems of Joule heating and electromigration (EM) in solder microbumps under 10 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mrow><mi mathvariant="sans-serif">μ</mi><mi mathvariant="normal">m</mi></mrow></mrow></semantics></math></inline-formula> in diameter. However, EM will occur in Cu–Cu bumps when the current density is over <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><msup><mrow><mn>10</mn></mrow><mn>6</mn></msup><mo> </mo><mi mathvariant="normal">A</mi><mo>/</mo><msup><mrow><mi>cm</mi></mrow><mn>2</mn></msup></mrow></semantics></math></inline-formula>. The surface, grain boundary, and the interface between the Cu and TiW adhesion layer are the three major diffusion paths in EM tests, and which one may lead to early failure is of interest. This study showed that bonding strength affects the outcome. First, if the bonding strength is not strong enough to sustain the thermal mismatch of materials during EM tests, the bonding interface will fracture and lead to an open circuit of early failure. Second, if the bonding strength can sustain the bonding structure, voids will form at the passivation contact area between the Cu–Cu bump and redistribution layer (RDL) due to current crowding. When the void grows along the passivation interface and separates the Cu–Cu bump and RDL, an open circuit can occur, especially when the current density and temperature are severe. Third, under excellent bonding, when the voids at the contact area between the Cu–Cu bump and RDL do not merge together, the EM lifetime can be more than 5000 h.https://www.mdpi.com/1996-1944/14/21/6394electromigrationCu–Cu direct bondingthree-dimensional integrated circuits (3D ICs) |
| spellingShingle | Kai-Cheng Shie Po-Ning Hsu Yu-Jin Li K. N. Tu Chih Chen Effect of Bonding Strength on Electromigration Failure in Cu–Cu Bumps Materials electromigration Cu–Cu direct bonding three-dimensional integrated circuits (3D ICs) |
| title | Effect of Bonding Strength on Electromigration Failure in Cu–Cu Bumps |
| title_full | Effect of Bonding Strength on Electromigration Failure in Cu–Cu Bumps |
| title_fullStr | Effect of Bonding Strength on Electromigration Failure in Cu–Cu Bumps |
| title_full_unstemmed | Effect of Bonding Strength on Electromigration Failure in Cu–Cu Bumps |
| title_short | Effect of Bonding Strength on Electromigration Failure in Cu–Cu Bumps |
| title_sort | effect of bonding strength on electromigration failure in cu cu bumps |
| topic | electromigration Cu–Cu direct bonding three-dimensional integrated circuits (3D ICs) |
| url | https://www.mdpi.com/1996-1944/14/21/6394 |
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