Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy

Conventional friction force microscopes (FFMs), where micro cantilever probes are used, have a disadvantage that the accurate quantification of friction force has not been established yet. This comes from the difficulty of measurement of the probe torsion angle. On the other hand, a recently develop...

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Main Authors: Hiroaki Amakawa, Kenji Fukuzawa, Mitsuhiro Shikida, Hedong Zhang, Shintaro Itoh
Format: Article
Language:English
Published: Japanese Society of Tribologists 2010-07-01
Series:Tribology Online
Subjects:
Online Access:https://www.jstage.jst.go.jp/article/trol/5/3/5_3_144/_pdf/-char/en
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author Hiroaki Amakawa
Kenji Fukuzawa
Mitsuhiro Shikida
Hedong Zhang
Shintaro Itoh
author_facet Hiroaki Amakawa
Kenji Fukuzawa
Mitsuhiro Shikida
Hedong Zhang
Shintaro Itoh
author_sort Hiroaki Amakawa
collection DOAJ
description Conventional friction force microscopes (FFMs), where micro cantilever probes are used, have a disadvantage that the accurate quantification of friction force has not been established yet. This comes from the difficulty of measurement of the probe torsion angle. On the other hand, a recently developed dual-axis micro-mechanical probe does not require the torsion angle but the lateral displacement for the quantification of friction force. This probe measures the friction force with a double cantilever beam and the normal force with a torsion beam. Since the measurement of the lateral displacement is easier than that of the torsion angle, the dual-axis micro-mechanical probe is expected to provide more accurate and reproducible quantification. In this paper, we investigated two calibration methods for dual-axis micro-mechanical probes; probe adhesion and step structure methods. The probe adhesion method showed rather poor reproducibility for the lateral displacement detection. In contrast, the step structure method showed good reproducibility and good accuracy with the minimum detection limit of the order of 0.1 nm, which corresponds to the friction force of sub-nN for the probes with a spring constant of the order of 1 N/m. The dual-axis micro-mechanical probe can be used to quantify the nanotribological properties accurately.
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spelling doaj.art-0023e79799a2406a95a8de7a1a2f4d1d2022-12-21T17:33:35ZengJapanese Society of TribologistsTribology Online1881-21982010-07-015314414910.2474/trol.5.144trolQuantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force MicroscopyHiroaki Amakawa0Kenji Fukuzawa1Mitsuhiro Shikida2Hedong Zhang3Shintaro Itoh4Department of Micro/Nano Systems Engineering, Nagoya UniversityDepartment of Micro/Nano Systems Engineering, Nagoya UniversityDepartment of Micro/Nano Systems Engineering, Nagoya UniversityDepartment of Complex Systems Science, Nagoya UniversityDepartment of Micro/Nano Systems Engineering, Nagoya UniversityConventional friction force microscopes (FFMs), where micro cantilever probes are used, have a disadvantage that the accurate quantification of friction force has not been established yet. This comes from the difficulty of measurement of the probe torsion angle. On the other hand, a recently developed dual-axis micro-mechanical probe does not require the torsion angle but the lateral displacement for the quantification of friction force. This probe measures the friction force with a double cantilever beam and the normal force with a torsion beam. Since the measurement of the lateral displacement is easier than that of the torsion angle, the dual-axis micro-mechanical probe is expected to provide more accurate and reproducible quantification. In this paper, we investigated two calibration methods for dual-axis micro-mechanical probes; probe adhesion and step structure methods. The probe adhesion method showed rather poor reproducibility for the lateral displacement detection. In contrast, the step structure method showed good reproducibility and good accuracy with the minimum detection limit of the order of 0.1 nm, which corresponds to the friction force of sub-nN for the probes with a spring constant of the order of 1 N/m. The dual-axis micro-mechanical probe can be used to quantify the nanotribological properties accurately.https://www.jstage.jst.go.jp/article/trol/5/3/5_3_144/_pdf/-char/enatomic force microscopefriction force microscopetribology, cantilever probe
spellingShingle Hiroaki Amakawa
Kenji Fukuzawa
Mitsuhiro Shikida
Hedong Zhang
Shintaro Itoh
Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy
Tribology Online
atomic force microscope
friction force microscope
tribology, cantilever probe
title Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy
title_full Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy
title_fullStr Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy
title_full_unstemmed Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy
title_short Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy
title_sort quantification of friction force on dual axis micro mechanical probe for friction force microscopy
topic atomic force microscope
friction force microscope
tribology, cantilever probe
url https://www.jstage.jst.go.jp/article/trol/5/3/5_3_144/_pdf/-char/en
work_keys_str_mv AT hiroakiamakawa quantificationoffrictionforceondualaxismicromechanicalprobeforfrictionforcemicroscopy
AT kenjifukuzawa quantificationoffrictionforceondualaxismicromechanicalprobeforfrictionforcemicroscopy
AT mitsuhiroshikida quantificationoffrictionforceondualaxismicromechanicalprobeforfrictionforcemicroscopy
AT hedongzhang quantificationoffrictionforceondualaxismicromechanicalprobeforfrictionforcemicroscopy
AT shintaroitoh quantificationoffrictionforceondualaxismicromechanicalprobeforfrictionforcemicroscopy