Research on the rapid growth and structure of ultra-nanocrystalline diamond thin films

Research on the rapid growth and structure of ultra-nanocrystalline diamond thin films

Ultra-nanocrystalline diamond (UNCD) films were prepared by microwave plasma chemical vapour deposition (MPCVD) at different temperature conditions by adjusting the microwave power. The effects of the activation power of the reaction source and effects of the temperature of the substrate on the grow...

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Bibliographic Details
Main Authors: Shaobo WEI, Bing WANG, Ying XIONG
Format: Article
Language:zho
Published: Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd. 2023-04-01
Series:Jin'gangshi yu moliao moju gongcheng
Subjects:
uncd film
mpcvd
substrate temperature
growth rate；grain size
Online Access:http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2022.0122

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