A Flexible <i>a</i>-SiC-Based Neural Interface Utilizing Pyrolyzed-Photoresist Film (C) Active Sites
Carbon containing materials, such as graphene, carbon-nanotubes (CNT), and graphene oxide, have gained prominence as possible electrodes in implantable neural interfaces due to their excellent conductive properties. While carbon is a promising electrochemical interface, many fabrication processes ar...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-07-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/12/7/821 |
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| author | Chenyin Feng Christopher L. Frewin Md Rubayat-E Tanjil Richard Everly Jay Bieber Ashok Kumar Michael Cai Wang Stephen E. Saddow |
| author_facet | Chenyin Feng Christopher L. Frewin Md Rubayat-E Tanjil Richard Everly Jay Bieber Ashok Kumar Michael Cai Wang Stephen E. Saddow |
| author_sort | Chenyin Feng |
| collection | DOAJ |
| description | Carbon containing materials, such as graphene, carbon-nanotubes (CNT), and graphene oxide, have gained prominence as possible electrodes in implantable neural interfaces due to their excellent conductive properties. While carbon is a promising electrochemical interface, many fabrication processes are difficult to perform, leading to issues with large scale device production and overall repeatability. Here we demonstrate that carbon electrodes and traces constructed from pyrolyzed-photoresist-film (PPF) when combined with amorphous silicon carbide (<i>a-</i>SiC) insulation could be fabricated with repeatable processes which use tools easily available in most semiconductor facilities. Directly forming PPF on <i>a</i>-SiC simplified the fabrication process which eliminates noble metal evaporation/sputtering and lift-off processes on small features. PPF electrodes in oxygenated phosphate buffered solution at pH 7.4 demonstrated excellent electrochemical charge storage capacity (CSC) of 14.16 C/cm<sup>2</sup>, an impedance of 24.8 ± 0.4 kΩ, and phase angle of −35.9 ± 0.6° at 1 kHz with a 1.9 kµm<sup>2</sup> recording site area. |
| first_indexed | 2024-03-10T09:31:04Z |
| format | Article |
| id | doaj.art-00ef81ba4a1d4e808530bd611102aa7f |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T09:31:04Z |
| publishDate | 2021-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-00ef81ba4a1d4e808530bd611102aa7f2023-11-22T04:25:03ZengMDPI AGMicromachines2072-666X2021-07-0112782110.3390/mi12070821A Flexible <i>a</i>-SiC-Based Neural Interface Utilizing Pyrolyzed-Photoresist Film (C) Active SitesChenyin Feng0Christopher L. Frewin1Md Rubayat-E Tanjil2Richard Everly3Jay Bieber4Ashok Kumar5Michael Cai Wang6Stephen E. Saddow7Department of Electrical Engineering, University of South Florida, Tampa, FL 33620, USANeuroNexus LLC, Ann Arbor, MI 48108, USADepartment of Mechanical Engineering, University of South Florida, Tampa, FL 33620, USANanotechnology Research & Education Center, University of South Florida, Tampa, FL 33620, USANanotechnology Research & Education Center, University of South Florida, Tampa, FL 33620, USADepartment of Mechanical Engineering, University of South Florida, Tampa, FL 33620, USADepartment of Mechanical Engineering, University of South Florida, Tampa, FL 33620, USADepartment of Electrical Engineering, University of South Florida, Tampa, FL 33620, USACarbon containing materials, such as graphene, carbon-nanotubes (CNT), and graphene oxide, have gained prominence as possible electrodes in implantable neural interfaces due to their excellent conductive properties. While carbon is a promising electrochemical interface, many fabrication processes are difficult to perform, leading to issues with large scale device production and overall repeatability. Here we demonstrate that carbon electrodes and traces constructed from pyrolyzed-photoresist-film (PPF) when combined with amorphous silicon carbide (<i>a-</i>SiC) insulation could be fabricated with repeatable processes which use tools easily available in most semiconductor facilities. Directly forming PPF on <i>a</i>-SiC simplified the fabrication process which eliminates noble metal evaporation/sputtering and lift-off processes on small features. PPF electrodes in oxygenated phosphate buffered solution at pH 7.4 demonstrated excellent electrochemical charge storage capacity (CSC) of 14.16 C/cm<sup>2</sup>, an impedance of 24.8 ± 0.4 kΩ, and phase angle of −35.9 ± 0.6° at 1 kHz with a 1.9 kµm<sup>2</sup> recording site area.https://www.mdpi.com/2072-666X/12/7/821pyrolyzed-photoresist-filmimplantable neural interfacesilicon carbide biotechnologymicrofabricationmicroelectrode array |
| spellingShingle | Chenyin Feng Christopher L. Frewin Md Rubayat-E Tanjil Richard Everly Jay Bieber Ashok Kumar Michael Cai Wang Stephen E. Saddow A Flexible <i>a</i>-SiC-Based Neural Interface Utilizing Pyrolyzed-Photoresist Film (C) Active Sites Micromachines pyrolyzed-photoresist-film implantable neural interface silicon carbide biotechnology microfabrication microelectrode array |
| title | A Flexible <i>a</i>-SiC-Based Neural Interface Utilizing Pyrolyzed-Photoresist Film (C) Active Sites |
| title_full | A Flexible <i>a</i>-SiC-Based Neural Interface Utilizing Pyrolyzed-Photoresist Film (C) Active Sites |
| title_fullStr | A Flexible <i>a</i>-SiC-Based Neural Interface Utilizing Pyrolyzed-Photoresist Film (C) Active Sites |
| title_full_unstemmed | A Flexible <i>a</i>-SiC-Based Neural Interface Utilizing Pyrolyzed-Photoresist Film (C) Active Sites |
| title_short | A Flexible <i>a</i>-SiC-Based Neural Interface Utilizing Pyrolyzed-Photoresist Film (C) Active Sites |
| title_sort | flexible i a i sic based neural interface utilizing pyrolyzed photoresist film c active sites |
| topic | pyrolyzed-photoresist-film implantable neural interface silicon carbide biotechnology microfabrication microelectrode array |
| url | https://www.mdpi.com/2072-666X/12/7/821 |
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