2.5D Flexible Wind Sensor Using Differential Plate Capacitors

In this paper, a novel 2.5-dimensional (2.5D) flexible wind sensor is proposed based on four differential plate capacitors. This design consists of a windward pillar, two electrode layers, and a support layer, which are all made of polydimethylsiloxane (PDMS) with different Young’s moduli. A 2 mm ×...

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Main Authors: Yu Wan, Zhenxiang Yi
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/21/9/3101
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author Yu Wan
Zhenxiang Yi
author_facet Yu Wan
Zhenxiang Yi
author_sort Yu Wan
collection DOAJ
description In this paper, a novel 2.5-dimensional (2.5D) flexible wind sensor is proposed based on four differential plate capacitors. This design consists of a windward pillar, two electrode layers, and a support layer, which are all made of polydimethylsiloxane (PDMS) with different Young’s moduli. A 2 mm × 2 mm copper electrode array is located on each electrode layer, forming four parallel plate capacitors as the sensitive elements. The wind in the xy-plane tilts the windward pillar, decreasing two capacitances on the windward side and increasing two capacitances on the leeward side. The wind in the <i>z</i>-axis depresses the windward pillar, resulting in an increase of all four capacitances. Experiments demonstrate that this sensor can measure the wind speed up to 23.9 m/s and the wind direction over the full 360° range of the xy-plane. The sensitivities of wind speed are close to 4 fF·m<sup>−1</sup>·s and 3 fF·m<sup>−1</sup>·s in the xy-plane and <i>z</i>-axis, respectively.
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spelling doaj.art-018b4b3e10f44597b7ad967a167f95ef2023-11-21T17:46:06ZengMDPI AGSensors1424-82202021-04-01219310110.3390/s210931012.5D Flexible Wind Sensor Using Differential Plate CapacitorsYu Wan0Zhenxiang Yi1Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, ChinaKey Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, ChinaIn this paper, a novel 2.5-dimensional (2.5D) flexible wind sensor is proposed based on four differential plate capacitors. This design consists of a windward pillar, two electrode layers, and a support layer, which are all made of polydimethylsiloxane (PDMS) with different Young’s moduli. A 2 mm × 2 mm copper electrode array is located on each electrode layer, forming four parallel plate capacitors as the sensitive elements. The wind in the xy-plane tilts the windward pillar, decreasing two capacitances on the windward side and increasing two capacitances on the leeward side. The wind in the <i>z</i>-axis depresses the windward pillar, resulting in an increase of all four capacitances. Experiments demonstrate that this sensor can measure the wind speed up to 23.9 m/s and the wind direction over the full 360° range of the xy-plane. The sensitivities of wind speed are close to 4 fF·m<sup>−1</sup>·s and 3 fF·m<sup>−1</sup>·s in the xy-plane and <i>z</i>-axis, respectively.https://www.mdpi.com/1424-8220/21/9/3101wind sensorflexible2.5Dcapacitors
spellingShingle Yu Wan
Zhenxiang Yi
2.5D Flexible Wind Sensor Using Differential Plate Capacitors
Sensors
wind sensor
flexible
2.5D
capacitors
title 2.5D Flexible Wind Sensor Using Differential Plate Capacitors
title_full 2.5D Flexible Wind Sensor Using Differential Plate Capacitors
title_fullStr 2.5D Flexible Wind Sensor Using Differential Plate Capacitors
title_full_unstemmed 2.5D Flexible Wind Sensor Using Differential Plate Capacitors
title_short 2.5D Flexible Wind Sensor Using Differential Plate Capacitors
title_sort 2 5d flexible wind sensor using differential plate capacitors
topic wind sensor
flexible
2.5D
capacitors
url https://www.mdpi.com/1424-8220/21/9/3101
work_keys_str_mv AT yuwan 25dflexiblewindsensorusingdifferentialplatecapacitors
AT zhenxiangyi 25dflexiblewindsensorusingdifferentialplatecapacitors