Film Thickness-Profile Measurement Using Iterative Peak Separation Structured Illumination Microscopy
The surface and thickness distribution measurement for transparent film is of interest for electronics and packaging materials. Structured illumination microscopy (SIM) is a prospective technique for measuring film due to its high accuracy and efficiency. However, when the distance between adjacent...
| Main Authors: | , , , , , |
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| Format: | Article |
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MDPI AG
2021-03-01
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| Series: | Applied Sciences |
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| Online Access: | https://www.mdpi.com/2076-3417/11/7/3023 |
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| author | Kejun Yang Chenhaolei Han Jinhua Feng Yan Tang Zhongye Xie Song Hu |
| author_facet | Kejun Yang Chenhaolei Han Jinhua Feng Yan Tang Zhongye Xie Song Hu |
| author_sort | Kejun Yang |
| collection | DOAJ |
| description | The surface and thickness distribution measurement for transparent film is of interest for electronics and packaging materials. Structured illumination microscopy (SIM) is a prospective technique for measuring film due to its high accuracy and efficiency. However, when the distance between adjacent layers becomes close, the peaks of the modulation depth response (MDR) start to overlap and interfere with the peak extraction, which restricts SIM development in the field of film measurement. In this paper, an iterative peak separation algorithm is creatively applied in the SIM-based technique, providing a precise peak identification even as the MDR peaks overlap and bend into one. Compared with the traditional method, the proposed method has a lower detection threshold for thickness. The experiments and theoretical analysis are elaborated to demonstrate the feasibility of the mentioned method. |
| first_indexed | 2024-03-10T12:49:56Z |
| format | Article |
| id | doaj.art-01ec52885dc3451e91dd3b4afb95d332 |
| institution | Directory Open Access Journal |
| issn | 2076-3417 |
| language | English |
| last_indexed | 2024-03-10T12:49:56Z |
| publishDate | 2021-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Applied Sciences |
| spelling | doaj.art-01ec52885dc3451e91dd3b4afb95d3322023-11-21T13:09:34ZengMDPI AGApplied Sciences2076-34172021-03-01117302310.3390/app11073023Film Thickness-Profile Measurement Using Iterative Peak Separation Structured Illumination MicroscopyKejun Yang0Chenhaolei Han1Jinhua Feng2Yan Tang3Zhongye Xie4Song Hu5State Key Laboratory of Optical Technologies for Micro-fabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan, ChinaState Key Laboratory of Optical Technologies for Micro-fabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan, ChinaState Key Laboratory of Optical Technologies for Micro-fabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan, ChinaState Key Laboratory of Optical Technologies for Micro-fabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan, ChinaState Key Laboratory of Optical Technologies for Micro-fabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan, ChinaState Key Laboratory of Optical Technologies for Micro-fabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan, ChinaThe surface and thickness distribution measurement for transparent film is of interest for electronics and packaging materials. Structured illumination microscopy (SIM) is a prospective technique for measuring film due to its high accuracy and efficiency. However, when the distance between adjacent layers becomes close, the peaks of the modulation depth response (MDR) start to overlap and interfere with the peak extraction, which restricts SIM development in the field of film measurement. In this paper, an iterative peak separation algorithm is creatively applied in the SIM-based technique, providing a precise peak identification even as the MDR peaks overlap and bend into one. Compared with the traditional method, the proposed method has a lower detection threshold for thickness. The experiments and theoretical analysis are elaborated to demonstrate the feasibility of the mentioned method.https://www.mdpi.com/2076-3417/11/7/3023optical measurementfilm thicknesssurface topographymicroscopy |
| spellingShingle | Kejun Yang Chenhaolei Han Jinhua Feng Yan Tang Zhongye Xie Song Hu Film Thickness-Profile Measurement Using Iterative Peak Separation Structured Illumination Microscopy Applied Sciences optical measurement film thickness surface topography microscopy |
| title | Film Thickness-Profile Measurement Using Iterative Peak Separation Structured Illumination Microscopy |
| title_full | Film Thickness-Profile Measurement Using Iterative Peak Separation Structured Illumination Microscopy |
| title_fullStr | Film Thickness-Profile Measurement Using Iterative Peak Separation Structured Illumination Microscopy |
| title_full_unstemmed | Film Thickness-Profile Measurement Using Iterative Peak Separation Structured Illumination Microscopy |
| title_short | Film Thickness-Profile Measurement Using Iterative Peak Separation Structured Illumination Microscopy |
| title_sort | film thickness profile measurement using iterative peak separation structured illumination microscopy |
| topic | optical measurement film thickness surface topography microscopy |
| url | https://www.mdpi.com/2076-3417/11/7/3023 |
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