Film Thickness-Profile Measurement Using Iterative Peak Separation Structured Illumination Microscopy

The surface and thickness distribution measurement for transparent film is of interest for electronics and packaging materials. Structured illumination microscopy (SIM) is a prospective technique for measuring film due to its high accuracy and efficiency. However, when the distance between adjacent...

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Bibliographic Details
Main Authors: Kejun Yang, Chenhaolei Han, Jinhua Feng, Yan Tang, Zhongye Xie, Song Hu
Format: Article
Language:English
Published: MDPI AG 2021-03-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/11/7/3023

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