Film Thickness-Profile Measurement Using Iterative Peak Separation Structured Illumination Microscopy
The surface and thickness distribution measurement for transparent film is of interest for electronics and packaging materials. Structured illumination microscopy (SIM) is a prospective technique for measuring film due to its high accuracy and efficiency. However, when the distance between adjacent...
Main Authors: | Kejun Yang, Chenhaolei Han, Jinhua Feng, Yan Tang, Zhongye Xie, Song Hu |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-03-01
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Series: | Applied Sciences |
Subjects: | |
Online Access: | https://www.mdpi.com/2076-3417/11/7/3023 |
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