Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim

Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim

A large-area and ultrathin MEMS (microelectromechanical system) mirror can provide efficient light-coupling, a large scanning area, and high energy efficiency for actuation. However, the ultrathin mirror is significantly vulnerable to diverse film deformation due to residual thin film stresses, so t...

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Bibliographic Details
Main Authors:	Myeong-Su Ahn, Jaehun Jeon, Kyung-Won Jang, Ki-Hun Jeong
Format:	Article
Language:	English
Published:	MDPI AG 2021-06-01
Series:	Micromachines
Subjects:	large-area and ultrathin MEMS mirror bimorph thermal actuator statically actuated MEMS mirror silicon rim microstructures
Online Access:	https://www.mdpi.com/2072-666X/12/7/754

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